Investigation of growth mechanism of thin sputtered cerium oxide films on carbon substrates

Science of Advanced Materials

Volumn 6, Issue 6, 2014, Pages 1278-1285

  Haviar, Stanislav ^a   Dubau, Martin ^a   Lavková, Jaroslava ^a,b   Khalakhan, Ivan ^a   Potin, Valérie ^b   Matolín, Vladimír ^a   Matolínová, Iva ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

^b UNIVERSITÉ DE BOURGOGNE   (France)

Author keywords

Amorphous carbon; Atomic force microscopy; Cerium oxide; Growth model; Magnetron sputtering; Oxygen plasma; Porous structure; Scanning electron microscopy; Thin film; Transmission electron microscopy

Indexed keywords

EID: 84904654963     PISSN: 19472935     EISSN: 19472943     Source Type: Journal    
DOI: 10.1166/sam.2014.1905     Document Type: Article

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