Mass spectrometry techniques in the context of nanometrology

Microelectronic Engineering

Volumn 108, Issue , 2013, Pages 187-191

  Fregnaux, M ^a   Gaumet, J J ^a   Dalmasso, S ^a   Laurenti, J P ^a   Schneider, R ^b  

^a UNIVERSITÉ DE LORRAINE   (France)

^b UNIVERSITÉ DE LORRAINE   (France)

Author keywords

Mass spectrometry; Nanometrology; Semiconductors quantum dots

Indexed keywords

CADMIUM SULFIDE; CHARACTERIZATION; CHEMICAL ANALYSIS; CHEMICAL STABILITY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IONIZATION; MASS SPECTROMETRY; NANOCRYSTALS; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

ANALYSIS OF CHEMICAL COMPOSITION; GEOMETRIC OBSERVATION; IONIZATION TECHNIQUES; MATRIX ASSISTED LASER DESORPTION IONIZATION; NANOMETROLOGY; ORGANOMETALLIC PRECURSORS; PHYSICAL AND CHEMICAL PROPERTIES; SPECTROMETRY TECHNIQUE;

SEMICONDUCTOR QUANTUM DOTS;

EID: 84904394975     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2013.01.043     Document Type: Article

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