Decision support system of real time dispatching in semiconductor wafer fabrication with shortest process time in wet bench

2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002

Volumn , Issue , 2002, Pages 286-288

  Hsieh, M D ^a   Lin, Amos ^a   Kuo, Kenley ^a   Wang, H L ^a  

^a MACRONIX INTERNATIONAL CO LTD   (Taiwan)

Author keywords

Dispatching; Wet bench

Indexed keywords

ALGORITHMS; ARTIFICIAL INTELLIGENCE; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

DISPATCHING; DISPATCHING ALGORITHM; DISPATCHING RULES; REAL TIME DISPATCHING; REAL-TIME INFORMATION; SEMICONDUCTOR WAFER FABRICATION; SHORTEST PROCESS TIME; WET BENCH;

DECISION SUPPORT SYSTEMS;

EID: 84901714020     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMTW.2002.1197449     Document Type: Conference Paper

References (3)

1. Kazuyuki Saito and Sumika &ma, "A Simulation Study on Periodical Priority dispatching ol'WIP for Product-mix Fabrication, " in Conf. Proc. 2002EEE Int. Symp. Semiconductor Manufacturing, 2002, pp. 33-37.
2. Wolfgang Scholl and Joerg Doinaschke, "Implementation of Modeling and Simulation in Semiconductor Wafer Fabrication wi1.h Time Constraints Between Wet Etch and Furnace Operations, " in Conf. hoc. 20001EEE Int. Symp. Semiconductor Manufacturing, 2000, pp. 273-277.
3. J. P. Wmz and P. T. Lim, "Improvement of production logistics for backend manufacturing, " in Conf. Proc. 1999EEE int. Symp. Semiconductor Manufacturing, 1999, pp. 81-84.