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Volumn 315, Issue , 2013, Pages 244-247
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Anisotropic dewetting of ion irradiated solid films
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Author keywords
Dewetting; Focused ion beam; Ions; Self organization; Sputtering; Thin films
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Indexed keywords
CHROMIUM;
CONTINUUM MECHANICS;
FOCUSED ION BEAMS;
GALLIUM ALLOYS;
ION BEAMS;
ION BOMBARDMENT;
IRRADIATION;
SCANNING ELECTRON MICROSCOPY;
SPUTTERING;
SUBSTRATES;
THIN FILMS;
ULTRATHIN FILMS;
VAN DER WAALS FORCES;
ANISOTROPIC DEWETTING;
CONTINUUM MODELING;
DE-WETTING;
DIFFERENTIAL SPUTTERING;
IRRADIATION PROCESS;
SELF ORGANIZATIONS;
SELF-ORGANIZATION PROCESS;
SILICON SUBSTRATES;
IONS;
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EID: 84901456698
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2013.04.010 Document Type: Article |
Times cited : (4)
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References (18)
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