NH3 sensing properties of ZnO thin films prepared via sol-gel method

Journal of Alloys and Compounds

Volumn 606, Issue , 2014, Pages 27-31

  Li, Ching Feng ^a   Hsu, Chia Yen ^a   Li, Yuan Yao ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Gas sensor; Sol gel; Thin film; ZnO

Indexed keywords

CHEMICAL SENSORS; METALLIC FILMS; OPTICAL FILMS; OXYGEN; SENSORS; SINTERING; SOL-GEL PROCESS; SOL-GELS; THIN FILMS; ZINC COMPOUNDS;

2-METHOXYETHANOL; CHARACTERIZATION OF THE FILMS; MONOETHANOLAMINE; OXYGEN CONCENTRATIONS; SENSING PROPERTY; ZNO; ZNO NANOPARTICLES;

FILM PREPARATION;

EID: 84899530488     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2014.03.120     Document Type: Article

References (35)

1. N. Yamazoe New approaches for improving semiconductor gas sensors Sens. Actuators, B 5 1991 7 19
2. G. Sberveglieri Recent developments in semiconducting thin-film gas sensors Sens. Actuators, B 23 1995 103 109
3. 2 using tin oxide nanowire sensors Adv. Mater. 15 2003 997 1000
4. A.S. Zuruzi, A. Kolmakov, N.C. MacDonald, and M. Moskovits Highly sensitive gas sensor based on integrated titania nanosponge arrays Appl. Phys. Lett. 88 2006
5. Y.S. Kim, S.C. Ha, K. Kim, H. Yang, S.Y. Choi, and Y.T. Kim et al. Room-temperature semiconductor gas sensor based on nonstoichiometric tungsten oxide nanorod film Appl. Phys. Lett. 86 2005
6. H. Huang, O.K. Tan, Y.C. Lee, T.D. Tran, M.S. Tse, and X. Yao Semiconductor gas sensor based on tin oxide nanorods prepared by plasma-enhanced chemical vapor deposition with postplasma treatment Appl. Phys. Lett. 87 2005
7. 2 nanoparticles for gas sensor applications Adv. Mater. 12 2000 965 968
8. 2-nanotube hydrogen sensor able to self-clean photoactively from environmental contamination J. Mater. Res. 19 2004 628 634
9. 2 Jpn. J. Appl. Phys. 47 2008 3272 3276
10. J.Q. Xu, Q.Y. Pan, Y.A. Shun, and Z.Z. Tian Grain size control and gas sensing properties of ZnO gas sensor Sens. Actuators, B 66 2000 277 279
11. 3 nanowires as chemical sensors Appl. Phys. Lett. 82 2003 1613 1615
12. 2O and CuO nanospheres: preparation and applications for sensitive gas sensors Chem. Mater. 18 2006 867 871
13. T. Seiyama, A. Kato, K. Fujiishi, and M. Nagatani A new detector for gaseous components using semiconductive thin films Anal. Chem. 34 1962 1502 1503
14. x sensor Sens. Actuators, B 66 2000 119 121
15. Q. Wan, Q.H. Li, Y.J. Chen, T.H. Wang, X.L. He, and J.P. Li et al. Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors Appl. Phys. Lett. 84 2004 3654 3656
16. J.F. Chang, H.H. Kuo, I.C. Leu, and M.H. Hon The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor Sens. Actuators, B 84 2002 258 264
17. J.X. Wang, X.W. Sun, Y. Yang, H. Huang, Y.C. Lee, and O.K. Tan et al. Hydrothermally grown oriented ZnO nanorod arrays for gas sensing applications Nanotechnology 17 2006 4995 4998
18. 3 gas sensing properties of nanocrystalline ZnO based thick films Anal. Chim. Acta 568 2006 41 46
19. 3 gas sensor Sens. Actuators, B 115 2006 128 133
20. 3-activated ZnO thick film resistors for ammonia gas sensing operable at room temperature Sens. Actuators, B 126 2007 368 374
21. Y.F. Chen, D. Bagnall, and T.F. Yao ZnO as a novel photonic material for the UV region Mater. Sci. Eng., B 75 2000 190 198
22. J. Ma, F. Ji, H.l. Ma, and S.y. Li Preparation and characterization of ZnO films by an evaporating method J. Vac. Sci. Technol., A 13 1995 92 94
23. S. Naseem, M. Iqbal, and K. Hussain Optoelectrical and structural properties of evaporated indium oxide thin films Sol. Energy Mater. Sol. Cells 31 1993 155 162
24. S. Fay, U. Kroll, C. Bucher, E. Vallat-Sauvain, and A. Shah Low pressure chemical vapour deposition of ZnO layers for thin-film solar cells: temperature-induced morphological changes Sol. Energy Mater. Sol. Cells 86 2005 385 397
25. M. Krunks, and E. Mellikov Zinc oxide thin films by the spray pyrolysis method Thin Solid Films 270 1995 33 36
26. M. Ohyama, H. Kozuka, and T. Yoko Sol-gel preparation of ZnO films with extremely preferred orientation along (0 0 2) plane from zinc acetate solution Thin Solid Films 306 1997 78 85
27. A. Maldonado, S. Tirado-Guerra, J.M. Cazares, and M.D. Olvera Physical and sensing properties of ZnO:F:Al thin films deposited by sol-gel Thin Solid Films 518 2010 1815 1820
28. 3 gas sensor based on hydrothermally grown ZnO nanorods Chin. Phys. Lett. 28 2011
29. E.A. Dalchiele, P. Giorgi, R.E. Marotti, F. Martin, J.R. Ramos-Barrado, and R. Ayouci et al. Electrodeposition of ZnO thin films on n-Si (1 0 0) Sol. Energy Mater. Sol. Cells 70 2001 245 254
30. N. Yamazoe, G. Sakai, and K. Shimanoe Oxide semiconductor gas sensors Catal. Surv. Asia 7 2003 63 75
31. N. Barsan, and U. Weimar Conduction model of metal oxide gas sensors J. Electroceram. 7 2001 143 167
32. D.E. Williams Semiconducting oxides as gas-sensitive resistors Sens. Actuators, B 57 1999 1 16
33. R.W.J. Scott, S.M. Yang, G. Chabanis, N. Coombs, D.E. Williams, and G.A. Ozin Tin dioxide opals and inverted opals: near-ideal microstructures for gas sensors Adv. Mater. 13 2001 1468 1472
34. x conductance-modulation carbon monoxide sensor J. Electrochem. Soc. 126 1979 627 633
35. J. Mizsei How can sensitive and selective semiconductor gas sensors be made? Sens. Actuators, B 23 1995 173 176