Liquid-filled sealed MEMS capsules fabricated by fluidic self-assembly

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 56-59

  Mastrangeli, Massimo ^a   Jacot Descombes, Loic ^a   Gullo, Maurizio R ^a   Brugger, Juergen ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DRUG DELIVERY; ENCAPSULATION; LIQUIDS; SELF ASSEMBLY;

ASSEMBLY YIELDS; CAPILLARY FORCE; CELL ENCAPSULATIONS; CO-ENCAPSULATION; FLUIDIC SELF-ASSEMBLY; FUNCTIONAL LIQUID; MASSIVELY PARALLELS; MEMS FABRICATION;

MEMS;

EID: 84899002354     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765572     Document Type: Conference Paper

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