Low gas permeable and non-absorbent rubbery OSTE+ for pneumatic microvalves

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 987-990

  Hansson, Jonas ^a   Karlsson, J Mikael ^a   Carlborg, Carl Fredrik ^a   Van Der Wijngaart, Wouter ^a   Haraldsson, Tommy ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; MICROCHANNELS; PLASMA APPLICATIONS; PNEUMATICS; POLYMERS; VALVES (MECHANICAL);

MICRO FLUIDIC APPLICATIONS; MICRO VALVES; MICROMOLDING; NO ABSORPTION; PLASMA TREATMENT; POLYMER SYSTEMS; ROOM TEMPERATURE;

GAS ABSORPTION;

EID: 84898951170     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765809     Document Type: Conference Paper

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