Thermopile infrared array sensor for human detector application

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2014, Pages 1213-1216

  Tanaka, J ^a   Shiozaki, M ^a   Aita, F ^a   Seki, T ^a   Oba, M ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DETECTORS; INFRARED DETECTORS; MEMS;

CHIP SCALE; CMOS PROCESSS; FABRICATION PROCESS; INFRA-RED SENSOR; INFRARED ARRAYS; MASS PRODUCTION; S-SHAPED; VACUUM PACKAGE;

THERMOPILES;

EID: 84898942502     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2014.6765866     Document Type: Conference Paper

References (3)

1. T. Ishikawa, M. Kimata, Proc. SPIE, Vol.4130, 152, 2000
2. M. Hirota, "120 x 90 element thermopile infrared focal plane array with precisely patterned Au-black absorber", Sensors and Actuators A135, 2007, pp. 146-151.
3. M. Takeda, M. Kimata, "Chip scale vacuum packaging for uncooled IRFPA", IEEJ Trans. FM, Vol. 127, No. 7, 2007