메뉴 건너뛰기




Volumn 135, Issue 1, 2007, Pages 146-151

120 × 90 element thermoelectric infrared focal plane array with precisely patterned Au-black absorber

Author keywords

Au black; Infrared; Sensors; Thermoelectric; Vehicles

Indexed keywords

CMOS INTEGRATED CIRCUITS; CONSUMER ELECTRONICS; INFRARED RADIATION; THERMOCOUPLES; VAPOR DEPOSITION; WAVELENGTH;

EID: 33947247584     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.058     Document Type: Article
Times cited : (61)

References (12)
  • 1
    • 0027873637 scopus 로고
    • Uncooled thermal imaging at Texas Instruments
    • Hanson C. Uncooled thermal imaging at Texas Instruments. SPIE 1689 (1993) 330-339
    • (1993) SPIE , vol.1689 , pp. 330-339
    • Hanson, C.1
  • 2
    • 0026973369 scopus 로고    scopus 로고
    • R.A. Wood, C.J. Han, P.W. Kruse, Integrated uncooled IR detector imaging arrays, Proceedings of the IEEE Solid State Sensor and Actuator Workshop, 1992, pp. 132-135.
  • 3
    • 4344586500 scopus 로고
    • Uncooled infrared focal plane array having 128 × 128 thermopile detector elements
    • Kanno T., and Saga M. Uncooled infrared focal plane array having 128 × 128 thermopile detector elements. SPIE 2269 (1994)
    • (1994) SPIE , vol.2269
    • Kanno, T.1    Saga, M.2
  • 5
    • 0032689075 scopus 로고    scopus 로고
    • Low-cost 320 × 240 uncooled IRFPA using conventional silicon IC process
    • Ishikawa T., Ueno M., Endo K., Nakaki Y., Hata H., Sone T., Kimata M., and Ozeki T. Low-cost 320 × 240 uncooled IRFPA using conventional silicon IC process. SPIE 3698 (1999) 556-564
    • (1999) SPIE , vol.3698 , pp. 556-564
    • Ishikawa, T.1    Ueno, M.2    Endo, K.3    Nakaki, Y.4    Hata, H.5    Sone, T.6    Kimata, M.7    Ozeki, T.8
  • 6
    • 0022813826 scopus 로고
    • Thermal sensors based on the Seebeck effect
    • Herwaarden A.W., and Sarro P.M. Thermal sensors based on the Seebeck effect. Sens. Actuators A 10 (1986) 321-346
    • (1986) Sens. Actuators A , vol.10 , pp. 321-346
    • Herwaarden, A.W.1    Sarro, P.M.2
  • 7
    • 0027615155 scopus 로고
    • Thermoelectric infrared sensors in CMOS technology
    • Lenggenhanger R., Baltes H., and Elbel T. Thermoelectric infrared sensors in CMOS technology. Sens. Actuators A 37-38 (1993) 216-220
    • (1993) Sens. Actuators A , vol.37-38 , pp. 216-220
    • Lenggenhanger, R.1    Baltes, H.2    Elbel, T.3
  • 8
    • 0035760434 scopus 로고    scopus 로고
    • Progress towards high-performance thermopile imaging arrays
    • Foote M.C. Progress towards high-performance thermopile imaging arrays. SPIE 4369 (2001) 350-354
    • (2001) SPIE , vol.4369 , pp. 350-354
    • Foote, M.C.1
  • 9
    • 0034360654 scopus 로고    scopus 로고
    • 48 × 32 Element thermoelectric infrared focal plane array with precisely patterned Au-black absorber
    • Hirota M., Satou F., Saito M., and Morita S. 48 × 32 Element thermoelectric infrared focal plane array with precisely patterned Au-black absorber. Sens. Mater. 12 5 (2000) 289-300
    • (2000) Sens. Mater. , vol.12 , Issue.5 , pp. 289-300
    • Hirota, M.1    Satou, F.2    Saito, M.3    Morita, S.4
  • 10
    • 0003021208 scopus 로고    scopus 로고
    • Nighttime pedestrian monitoring system and thermal infrared technology
    • (in Japanese)
    • Hirota M., Saito M., Morita S., and Fukuhara H. Nighttime pedestrian monitoring system and thermal infrared technology. JIDOSHA GIJUTSU 50 11 (1996) 58-63 (in Japanese)
    • (1996) JIDOSHA GIJUTSU , vol.50 , Issue.11 , pp. 58-63
    • Hirota, M.1    Saito, M.2    Morita, S.3    Fukuhara, H.4
  • 11
    • 0035761524 scopus 로고    scopus 로고
    • Thermoelectric infrared imager and automotive applications
    • Hirota M., Satou F., Saito M., Kishi Y., Nakajima Y., and Uchiyama M. Thermoelectric infrared imager and automotive applications. SPIE 4369 (2001) 312-321
    • (2001) SPIE , vol.4369 , pp. 312-321
    • Hirota, M.1    Satou, F.2    Saito, M.3    Kishi, Y.4    Nakajima, Y.5    Uchiyama, M.6
  • 12
    • 0032294745 scopus 로고    scopus 로고
    • Infrared sensor with precisely patterned Au-black absorption layer
    • Hirota M., and Morita S. Infrared sensor with precisely patterned Au-black absorption layer. SPIE 3436 (1998) 623-634
    • (1998) SPIE , vol.3436 , pp. 623-634
    • Hirota, M.1    Morita, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.