Simulation of a LIG(A) production line

4th International Industrial Simulation Conference 2006, ISC 2006

Volumn , Issue , 2006, Pages 442-445

  Meyer, Pascal ^a   Arendt, Markus ^b   Schulz, Joachim ^b  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FABRICATION; MASKS; X RAYS;

BATCH FABRICATION; HIGH ASPECT RATIO MICROSTRUCTURES; MANUFACTURING LINES; MARKET PENETRATION; MODELLING AND SIMULATIONS; PRODUCTION LINE; SIMULATION MODEL; STRATEGIC DECISIONS;

THROUGHPUT;

EID: 84898425073     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Meyer P, Janssen A, Maas D., Saile V, Schulz J, Arendt M. 2004 "The German initiative to commercialize the LIGA technology - A LIGA fabrication line at ANKA,". Proceedings of the 9th International Conference of Commercialization of Micro and Nano Systems (August 29th-September 2th, 2004), Edmonton, Alberta (Canada), pp. 142-146.
2. Meyer P, Schulz J, Hahn L. 2003. "DoseSim: MS-Windows Graphical User Interface for using Synchrotron X-ray Exposure and Subsequent Development in the LIGA process,". Review of Scientific Instrument, 74 (2), 1113-1119.
3. Aybar M., Potti K., and Lebaron T. 2002, "Using simulation to understand capacity constraints and improve efficiency on process tools,". Proceedings of the 2002 Winter Simulation Conference, ed. E. Ycesan, C - H. Chen, J. L. Snowdon, and J. M. Charnes, Pistcataway, New Jersey: Institute of Electrical and Electronic Engineers, 1431-1435
4. Kelton W.D., Sadowski R.P., and Sturrock D. T. 2003, "Simulation with Arena,". 3rd. Edition, McGraw-Hill, USA