Using simulation to understand capacity constraints and improve efficiency on process tools

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2002, Pages 1431-1435

  Aybar, Manuel ^a   Potti, Kishore ^a   LeBaron, Todd ^b  

^a TEXAS INSTRUMENTS   (United States)

^b Brooks Automation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; EFFICIENCY; MATERIALS HANDLING EQUIPMENT; PROCESS ENGINEERING; QUALITY CONTROL; REQUIREMENTS ENGINEERING; SCHEDULING; THROUGHPUT; WSI CIRCUITS;

CLUSTER TOOLS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036923628     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Hendrickson, R. 1997. "Optimizing Cluster Tool Throughput". In Solid State Technology July.
2. Pool, Mark. 1994. "The Simulation of Cluster Tools: A New Semiconductor Manufacturing Technology". In Proceedings of the 1994 Winter Simulation Conference.
3. Hendrickson, R, 2000. "Using Emulation to Validate a Cluster Tool Simulation Model". In Proceedings of the 2000 Winter Simulation Conference.
4. Pare, K, 2002. "Using Simulation to Understand and Improve Process Tool Efficiency". In Proceedings of the MASM 2002.