The effect of low-k dielectrics on RFIC inductors

Conference Proceedings - 33rd European Microwave Conference, EuMC 2003

Volumn 1, Issue , 2003, Pages 53-56

  Jeon, Jong Hyeok ^a   Inigo, Emigdio J ^b   Reiha, Michael T ^b   Choi, Tae Young ^b   Lee, Yongshik ^b   Mohammadi, Saeed ^a   Katehi, Linda P B ^a  

^a Purdue University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

BCB; Dielectric loss; Inductor; Quality factor; Self resonant frequency; SU 8

Indexed keywords

DIELECTRIC LOSSES; NATURAL FREQUENCIES;

BCB; HIGH QUALITY FACTORS; HIGH-RESISTIVITY SILICON SUBSTRATE; INDUCTOR; LOW DIELECTRIC MATERIALS; LOW-DIELECTRIC POLYMERS; QUALITY FACTORS; SELF RESONANT FREQUENCY;

DIELECTRIC MATERIALS;

EID: 84897487708     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2003.1262216     Document Type: Conference Paper

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