Real time spectroscopic ellipsometry of first stage CuIn 1-xGaxSe2: Indium-gallium selenide co-evaporation

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2013, Pages 414-419

  Pradhan, Puja ^a   Attygalle, Dinesh ^a   Aryal, Puruswottam ^a   Podraza, N J ^a   Ferlauto, A S ^b   Marsillac, S ^c   Collins, R W ^a  

^a UNIVERSITY OF TOLEDO   (United States)

^b FEDERAL UNIVERSITY OF MINAS GERAIS   (Brazil)

^c Old Dominion University   (United States)

Author keywords

Ellipsometry; Gallium based semiconductor materials; Photovoltaic cells; Thickness measurement

Indexed keywords

DEPOSITION; ELLIPSOMETRY; EVAPORATION; GALLIUM; INDIUM; OPEN CIRCUIT VOLTAGE; PHOTOVOLTAIC CELLS; PROCESS MONITORING; SELENIUM COMPOUNDS; SEMICONDUCTING SELENIUM COMPOUNDS; SOLAR CELLS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

COMPLEX DIELECTRIC FUNCTIONS; COMPOSITIONAL INFORMATION; DEVICE FABRICATIONS; FILLING FRACTIONS; IN-SITU MONITORING; PROCESS MONITORING AND CONTROL; REAL TIME SPECTROSCOPIC ELLIPSOMETRY; THIN-FILM DEPOSITIONS;

GALLIUM ALLOYS;

EID: 84896467270     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2013.6744180     Document Type: Conference Paper

References (3)

1. D. Attygalle, V. Ranjan, P. Aryal, P. Pradhan, S. Marsillac, N. J. Podraza, and R. W. Collins, "Optical monitoring and control of three-stage co-evaporated Cu(In1-xGax)Se2 by real time spectroscopic ellipsometry," J. Photovolt., Vol. 3, pp. 375-380, January 2013.
2. P. Aryal, D. Attygalle, P. Pradhan, N. J. Podraza, S. Marsillac, and R. W. Collins, "Large area compositional mapping of Cu(In1-xGax)Se2 materials and devices with spectroscopic ellipsometry, J. Photovolt., Vol. 3, pp. 359-363, January 2013.
3. C. Beilharz, "Charakterisierung von aus der Schmelze gezüchteten Kristallen in den Systemen Kupfer-Indium-Selen und Kupfer-Indium-Gallium-Selen für Photovoltaische Anwendungen," Ph. D. Thesis, Albert-Ludwigs-Universität, Freiburg i. Br., 1999.