Phase-stepping algorithms: Overviewand simulations

Interferometry Principles and Applications

Volumn , Issue , 2012, Pages 415-446

  Buytaert, Jan A N ^a   Dirckx, Joris J J ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Algorithms; Arctangent; Interferometry; Phase evaluation; Phase shifting; Phase stepping

Indexed keywords

EID: 84895335945     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (33)

1. JRP Angel and P Wizinowich. ESO Conference on Very Large Telescopes and their Instrumentation, Vol. 1, chapter A method for phase shifting interferometry in the presence of vibration, pages 561-567. 1988.
2. H Bi, Y Zhang, KV Ling, and C Wen. Class of 4+1-phase algorithms with error compensation. Appl Opt, 42(21):4199-4207, 2004.
3. JH Bruning, DR Herriott, JE Gallagher, DP Rosenfeld, DA White, and DJ Brangaccio. Digital wavefront measuring interferometer for testing optical surfaces and lenses. Appl Opt, 13:2693, 1974.
4. JAN Buytaert and JJJ Dirckx. Design considerations in projection phase-shift moiré topography based on theoretical analysis of fringe formation. J Opt Soc Am A, 24(7): 2003-2013,2007.
5. JAN Buytaert and JJJ Dirckx. Phase-shifting moiré topography using optical demodulation on liquid crystal matrices. Opt Laser Eng, 48(2):172-181, 2010.
6. JAN Buytaert and JJJ Dirckx. Optical Methods for Solid Mechanics, chapter Fringe projection profilometry. John Wiley & Sons, 2011.
7. P Carré. Installation et utilisation du comparateur photoélectrique et interférentiel du bureau international des poids et mesures. Metrologia, 2:13-23, 1966.
8. P de Groot. Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. Appl Opt, 34(22):4723-4730,1995.
9. PJ de Groot. Proc SPIE vol 2248, chapter Long-wavelength laser diode interferometer for surface flatness measurements, pages 136-140. SPIE, 1994.
10. J Estrada, F Mendoza-Santoyo, and M de la Torre. Fringe 2009: 6th International Workshop On Advanced Optical Metrology, chapter Digital dynamic-fringe pattern frequency carrier, using wideband phase-shifting algorithms, pages 78-86. Springer, 2009.
11. P Hariharan and BF Oreb. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm. Appl Opt, 24: 2504-2505, 1987.
12. K Hibino, BF Oreb, DI Farrant, and KG Larkin. Phase shifting for nonsinusoidal waveforms with phase-shift errors. J Opt Soc Am A, 12(4):761-768, 1995.
13. K Hibino, DI Farrant, BK Ward, and BF Oreb. Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts. J Opt Soc Am A, 14(25):918-930, 1997.
14. Y. Ishii and R. Onodera. Phase-extraction algorithm in laser-diode phase-shifting interferometry. Opt Lett, 20(18):1883-1885, Sep 1995.
15. W Juptner, TM Kreis, and H Kreitlow. Proc SPIE vol 398, chapter Automatic evaluation of holographic interferograms by reference beam phase shifting, pages 22-29. SPIE, 1983.
16. D Kerr, F Mendoza Santoyo, and JR Tyrer. Extraction of phase data from electronic speckle pattern interferometric fringes using a single-phase-step method: a novel approach. J Opt Soc Am A, 7(5):820-826, 1990.
17. T Kreis. Handbook of holographic interferometry: optical and digital methods. John Wiley & Sons, 2005.
18. KG Larkin and BF Oreb. Design and assessment of symmetrical phase-shifting algorithms. J Opt Soc Am A, 9(10):1740-1748, 1992.
19. W Osten. Optical methods in experimental solid mechanics, chapter Digital processing and evaluation of fringe patterns in optical metrology and non-destructive testing, pages 308-363. Springer-Verlag, 2000.
20. M Owner-Petersen. Digital speckle pattern shearing interferometry: limitations and prospects. Appl Opt, 30: 2730-2738, 1991.
21. F Pfeiffer, M Bech, O Bunk, P Kraft, EF Eikenberry, CH Bronnimann, C Grunzweig, and C David. Hard-x-ray dark-field imaging using a grating interferometer. Nature Materials, 7:134-137, 2008.
22. J Schmit and K Creath. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. Appl Opt, 34:3610-3619, 1995.
23. J Schmit and K Creath. Window function influence on phase error in phase-shifting algorithms. Appl Opt, 35:5642-5649, 1996.
24. H Schreiber and JH Bruning. Optical shop testing, chapter Phase-shifting interferometry, pages 547-655. John Wiley & Sons, 3rd edition, 2007.
25. J Schwider, R Burrow, KE Elssner, J Grzanna, R Spolaczyk, and K Merkel. Digital wave-front measuring interferometry: some systematic error sources. Appl Opt, 22: 3421-3432, 1983.
26. J Schwider, O Falkenstoerfer, H Schreiber, A Zoeller, and N Streibl. New compensating four-phase algorithm for phase-shift interferometry. Opt Eng, 32(8):1883-1885, 1993.
27. G Stoilov and T Dragostinov. Phase-stepping interferometry: Five-frame algorithm with an arbitrary step. Opt Laser Eng, 28:61-69, 1997.
28. Y Surrel. Phase stepping: a new self-calibrating algorithm. Appl Opt, 32(19):3598-3600, 1993.
29. Y Surrel. Design of algorithms for phase measurements by the use of phase stepping. Appl Opt, 35(1):51-60, 1996.
30. Y Surrel. Design of phase-detection algorithms insensitive to bias modulation. Appl Opt, 36(4):805-807,1997.
31. M Takeda, H Ina, and S Koboyashi. Fourier transform profilometry for the automatic measurement of 3-d object shapes. Appl Opt, 22(24):3977-3982, 1982.
32. JC Wyant, CL Koliopoulos, B Bhushan, and OE George. An optical profilometer for surface characterization of magnetic media. ASLE trans, 27(2):101-113, 1984.
33. H Zhang, MJ Lalor, and DR Burton. Robust, accurate seven-sample phase-shifting algorithm insensitive to nonlinear phase-shift error and second-harmonic distortion: a comparative study. Opt Eng, 38:1524, 1999.