Active defects generated in silicon by laser doping process

African Review of Physics

Volumn 6, Issue , 2011, Pages 229-238

  Barhdadi, A ^a,b   Hartiti, B ^c   Muller, J C ^d  

^a MOHAMMED V UNIVERSITY IN RABAT   (Morocco)

^b ABDUS SALAM INTERNATIONAL CENTRE FOR THEORETICAL PHYSICS   (Italy)

^c HASSAN II UNIVERSITY OF CASABLANCA   (Morocco)

^d CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84895063536     PISSN: None     EISSN: 22236589     Source Type: Journal    
DOI: None     Document Type: Article

References (66)

1. M. F. Ametowobla, Dr. Ing. Thesis, Institut fur Physikalische Elektronik der Universitat, Stuttgart, Germany, 2010.
2. th EU-PVSEC, Dresden (2006) p.941.
3. T. Akane, T. Nii and S. Matumoto, Jpn. J. Appl. Phys. 31, 4437 (1992).
4. C. White, S. Wilson, B. Appleton and F. Young, J. Appl. Phys. 51, 738 (1980).
5. C. White, Pulsed Laser Processing of Semiconductors, Eds. R. Beer and C. Albert (Academic Press, N.Y., 1984).
6. C. White, P. Pronko, S. Wilson, B. Appleton, J. Narayan and R. Young, J. Appl. Phys. 50, 3261 (1979).
7. R. Wood and G. Giles, Phys. Rev. B23, 2923 (1981).
8. R. Wood, J. Kirkpatrick and G. Giles, Phys. Rev. B23, 5555 (1981).
9. R. Wood, Phys. Rev. B25, 2786 (1982).
10. R. Wood, C. White and F. Young, Semiconductors and Semimetals, Vol.23, Eds. R. Beer and C. Albert (Academic Press, New York, 1984).
11. J. Poate and J. Mayer, Laser Annealing of Semiconductors (Academic Press, 1982).
12. D. Debarre, K.G.T. Noguchi and J. Boulmer, IEICE Trans. Electron. E85-C, 1098 (2002).
13. T. Deutsch, D. Ehrlich, D. Rathman, D. Silversmith and R. Osgood, J. Appl. Phys. Lett. 39, 825 (1981).
14. E. Fogarassy, R. Stuck, J. Grob and P. Siffert, J. Appl. Phys. 52, 1076 (1981).
15. Y. Wong, X. Yang, P. Chan and K. Tong, Appl. Surf. Sci. 64, 259 (1993).
16. E. Fogarassy, D. Lowndes, J. Narayan and C. White, J. Appl. Phys. 58, 2167 (1985).
17. D. Bollmann, G. Neumayer, R. Buchner and K. Haberger, Appl. Surf. Sci. 69, 249 (1993).
18. G. Kerrien, J. Boulmer, D. Debarre, D. Bouchier, A. Grouillet and D. Lenoble, Appl. Surf. Sci. 186, 45 (2002).
19. G. Bentini, M. Bianconi, L. Correa, R. Nipoti, D. Patti and A. Gasparotto, Appl. Surf. Sci. 36, 394 (1989).
20. T. Deutsch, J. Fan, G. Turner, R. Chapman, D. Ehrlich and R. Osgood, J. Appl. Phys. Lett. 38, 144 (1981).
21. A. Esturo-Breton, J. Kohler and J. Werner, Proc. 13th Workshop on Crystalline Silicon Solar Cell Materials and Processes (NREL, Golden, Colorado, USA, 2003) p.186.
22. A. Esturo-Breton, M. Ametowobla, C. Carlsson, J. Kohler and J. Werner, Proc. 21st European Photovoltaic Solar Energy Conference, Eds. H. Palz, H. Ossenbrink and P. Helm (WIP Munich, 2006) p.1247.
23. M. Ametowobla, A. Esturo-Breton, J. Kohler and J. Werner, Proc. 31st IEEE Photovolt. Spec. Conf. (IEEE, Piscatway, 2005) p.1277.
24. M. Ametowobla, J. Kohler, A. Esturo-Breton and J. Werner, Proc. 22nd European Photovoltaic Solar Energy Conference, Eds. W. Palz and H. Ossenbrink (WIP Munich, 2007) p.1403.
25. T. Roder, P. Grabitz, S. Eisele, C. Carlsson, J. Kohler and J. Werner, Proc. 34th IEEE Photovolt. Spec. Conf. (IEEE, Piscatway, 2009).
26. C. Carlsson, A. Esturo-Breton, M. Ametowobla, J. Kohler and J. Werner, Proc. 21st European Photovoltaic Solar Energy Conference, Eds. W. Palz and H. Ossenbrink (WIP Munich, Germany, 2006) p.938.
27. J. Carlsson, C. Kohler and J. Werner, Proc. 17th IEEE Photovolt. Spec. Conf. (IEEE, Piscatway, 2007) p.538.
28. http://www.ipe.uni-stuttgart.de/
29. B. Tjahjono, J. Guo and Z. Hameiri, Proc. 22nd European Photovoltaic Solar Energy Conference, Eds. W. Palz and H. Ossenbrink (WIP Munich, Germany, 2007) p.966.
30. B. Tjahjono, S. Wang and A. Sugianto, Proc. 23rd European Photovoltaic Solar Energy Conference, Eds. W. Palz and H. Ossenbrink (WIP Munich, Germany, 2008) p.1995.
31. D. Kray, A. Fell, S. Hopmann, K. Mayer, M. Mesec, S. Glunz and G. Willeke, Proc. 22nd European Photovoltaic Solar Energy Conf., Eds. W. Palz and H. Ossenbrink (WIP Munich, Germany, 2007) p.1227.
32. A. Mesli, J. C. Muller and P. Siffert, Laser Solid Interactions and Transient Thermal Processing of Materials, Suppl. of J. de Phys., C44, No.5, 281 (1983).
33. A. Slaoui, A. Barhdadi, J-C. Muller and P. Siffert, Appl. Phys. A39, 159 (1986).
34. W. O. Adekoya, J. C. Muller and P. Siffert, Appl. Phys. Lett. 49, No.21, 1429 (1986).
35. W. O. Adekoya, Ph.D. Thesis, University of Paris VII (1987), France.
36. B. Hartiti, A. Slaoui, J. C. Muller and P. Siffert, J. of Appl. Phys. 66, No.8, 3934 (1989).
37. B. Hartiti, A. Slaoui, J. C. Muller and P. Siffert, Materials Science and Eng. B 4, Nos.1-4, 257 (1989).
38. B. Hartiti, A. Slaoui, J. C. Muller and P. Siffert, Appl. Surf. Sci. 46, Nos.1-4, 371 (1990).
39. B. Hartiti, Ph.D. Thesis, University Louis Pasteur I, Strasbourg 1990, France.
40. A. Barhdadi, H. Amzil, N. M'gafad, J. C. Muller and P. Siffert, Proceedings of the First International Workshop on the Physics and Modern Applications of Lasers, 22-28 May 1991, Dakar, Senegal, p.359.
41. A. Barhdadi, Deuxième Ecole Euro-Maghrébine MEDISOL'2, 19-25 Sept. 1995, Marrakech, Morocco.
42. A. Barhdadi and J. C. Muller, Fourth International Workshop on the Physics and Modern Applications of Lasers, 6-14 Jan. 1996, Khartoum, Sudan.
43. A. Barhdadi and J. C. Muller, Revue des Energies Renouvelables 3, No.1, 29 (2000).
44. A. Barhdadi and J. C. Muller, Proceedings of the "Deuxièmes Journées d'Optique", 27-28 April 2000, Meknes, Morocco, p.82.
45. A. Barhdadi and B. Hartiti, International Conference on Optics and Lasers in Science and Technology for Sustainable Development 11-16 Jan. 2010, University Cheikh Anta Diop, Dakar, Senegal.
46. A. Barhdadi, B. Hartiti and J. C. Muller, International Workshop on Optics and Photonics, 5-8 Oct. 2010, Cadi Ayyad University Marrakech, Morocco.
47. A. Barhdadi and B. Hartiti, 2nd International Conference in Laser Science and its Applications 7-9 Dec. 2010, Khartoum, Sudan.
48. J. C. Muller, State doctorate thesis, Louis Pasteur University, Strasbourg, France, 1982.
49. T. Heiser, A. Mesli. E. Courcelle and P. Siffert, J. Appl. Phys. 64, 4031 (1988).
50. F. Foulon, E. Fogarassy, A. Slaoui, C. Fuchs, S. Unamuno and P. Siffert, Appl. Phys. A45, 361 (1988).
51. M. Toulemonde and P. Siffert, Appl. Phys. 25, 139 (1981).
52. D. Barbier, M. Remram, J. F. Joly and A. Laugier, J. Appl. Phys. 61, 156 (1987).
53. W. O. Adekoya, J. C. Muller and P. Siffert, Appl. Phys. A42, 227 (1987).
54. Y. N. Nikiforov and V. A. Yanushkevich, Sov. Phys. Semicond. 14, 314 (1980).
55. L. C. Kimerling and J. L. Benton, Laser and Electron Beam Processing of Material, Eds. C. W. White and P. S. Peercy (Academic, New York, 1980) p.385.
56. R. T. Young, J. Narayan, W. H. Christie, G. A. Van der Leaden, J. I. Levatter and L. J. Cheng., Solid State Technol. 26, 183 (1983).
57. A. Mesli, J. C. Muller, D. Salles and P. Siffert., Appl. Phys. Lett. 39, 159 (1981).
58. A. Mesli, A. Goltzene, J. C. Muller. B. Meyer, C. Schwab and P. Siffert, MRS Symp. Proc., 4, 349 (1982).
59. E. M. Lawson and S. J. Pearton, Phys. Status Solidi A12, K155 (1982).
60. K. L. Wang, Y. S. Lin, G. E. Passin, J. Karins and J. Corbett, J. Appl. Phys. 54, 3839 (1983).
61. J. L. Benton, L. C. Kimerling, G. L. Miller, D. A. Robinson and G. K. Celler, Laser-Solid Interactions and Laser Processing, Eds. S. D. Ferris, H. J. Leamy, and J. M. Poate (American Institute of Physics, N.Y., 1978) p.543.
62. J. L. Benton, C. J. Doherty, S. D. Ferris, D. L. Flamm, L. C. Kimerling and H. J. Leamy, Appl. Phys. Lett. 36, 670 (1980).
63. G. A. Kachurin, E. V. Nidaev, and N. V. Danyushkina, Sov. Phys. Semicond. 14, 386 (1980).
64. Z. K. Fan, V. Q. Ho and T. Sugano, Appl. Phys. Lett. 40, 418 (1982).
65. S. Unamuno and E. Fogarassy, Appl. Surf. Sci. 36, 1 (1989).
66. E. Hartiti, A. Slaoui. J. C. Muller and P. Siffert, Science and Technology of Defects in Silicon, E-MRS Proceedings Symposium B, Eds. C. A. J. Ammerlaan and A. Chantre (North-Holland, N.Y., 1989).