Laser processing of crystalline silicon solar cells

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2005, Pages 1277-1280

  Ametowobla, Mawuli ^a   Esturo Breton, Ainhoa ^a   Köhler, Jürgen R ^a   Werner, Jürgen H ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; DOPING (ADDITIVES); LASERS; SILICON; VACUUM;

DOPANT FILMS; PRECURSOR LIQUIDS; VACUUM EQUIPMENT;

SOLAR CELLS;

EID: 27944488009     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. E. Fogarassy, R. Stuck, J.J. Grob, P.Siffert, "Silicon solar cells realized by laser induced diffusion of vacuum-deposited dopants", J. Appl. Phys. 52 (1981), 1076-82
2. Y.W. Wong, X.Q. Yang, P.W. Chan, K.Y. long, "Excimer-laser doping of spin-on dopant in silicon", Appl. Surf. Sc. 64 (1993), 259-63
3. J.R. Köhler, M. Ametowobla, A. Esturo-Breton, J.H. Werner, "Numerical modellhg of pulsed laser doping of crystalline silicon solar cells", unpublished
4. R. F. Wood and C. W. White, Pulsed Laser Processing of Semiconductors, Semiconductors and Semimetals (Academic Press, Orlando, 1984), vol. 23.
5. A. Esturo-Breton, T. A. Wagner, J. R. Köhler and J. H. Werner, "Laser doping for crystalline silicon solar cell emitters", in 13th Workshop on Crystalline Silicon Solar Cell Materials and Processes (NREL, Vail, 2003), p. 186
6. A. Goetzberger, J. Knobloch, B. Voss, "Crystalline Silicon Solar Cells", John Wiley & Sons, Chichester, 1998, p. 81