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Chemical Vapor Deposition

Volumn 19, Issue 10-12, 2013, Pages 332-337

Growth of a carbon nanotube forest on silicon using remote plasma CVD

(4) Ismagilov, Rinat R a,b Shvets, Petr V a Zolotukhin, Aleksey A b Obraztsov, Alexander N a,b

a MOSCOW STATE UNIVERSITY (Russian Federation)

b UNIVERSITY OF EASTERN FINLAND (Finland)

Author keywords

Carbon nanotubes; MWCNT forest; Plasma activation; Porous silicon

Indexed keywords

EID: 84894549628 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.201207031 Document Type: Article

Times cited : (19)

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