Nanosphere lithography based technique for fabrication of large area well ordered metal particle arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8323, Issue , 2012, Pages

  Barcelo, Steven J ^a   Lam, Si Ty ^a   Gibson, Gary A ^a   Sheng, Xia ^a   Henze, Dick ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

nanofabrication; nanoparticle array; Nanosphere lithography; plasmonics; self assembly

Indexed keywords

INTERFACES (MATERIALS); ITO GLASS; LITHOGRAPHY; NANOPARTICLES; NANOSPHERES; NANOTECHNOLOGY; PARTICLES (PARTICULATE MATTER); SELF ASSEMBLY; SILVER;

AIR WATER INTERFACES; CLEAN GLASS SUBSTRATES; HYDROPHOBIC SUBSTRATE; NANO SPHERE LITHOGRAPHY; NANOPARTICLE ARRAY; PLASMONICS; POLYMER-COATED GLASS; WAVELENGTH-SELECTIVE;

SUBSTRATES;

EID: 84894453327     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.916600     Document Type: Conference Paper

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