Simulation of the anneal of ion implanted boron emitters and the impact on the saturation current density

Energy Procedia

Volumn 27, Issue , 2012, Pages 240-246

  Florakis, A ^a,b   Janssens, T ^a   Rosseel, E ^a   Douhard, B ^a   Delmotte, J ^a   Cornagliotti, E ^a   Poortmans, J ^a   Vandervorst, W ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Damage evolution; IBC; Ion Implantation; OED; Saturation current density

Indexed keywords

EID: 84894270787     PISSN: 18766102     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.egypro.2012.07.058     Document Type: Conference Paper

References (10)

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