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Volumn 86, Issue 3, 2014, Pages 1385-1390

Microwave-plasma dry-etch for fabrication of conducting polymer microelectrodes

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMICAL DETECTION; ELECTROCHEMICAL DETECTORS; ELECTROPHORETIC SEPARATIONS; MICELLAR ELECTROKINETIC CHROMATOGRAPHY; MICROWAVE-GENERATED PLASMAS; OPTICAL TRANSPARENCY; STEADY-STATE CYCLIC VOLTAMMETRY; TRANSPARENT CONDUCTIVE;

EID: 84893611184     PISSN: 00032700     EISSN: 15206882     Source Type: Journal    
DOI: 10.1021/ac403363a     Document Type: Article
Times cited : (13)

References (48)
  • 42
    • 0024127172 scopus 로고
    • Pulsed microwave plasma etching of polymers in oxygen and nitrogen for microelectronic applications
    • Lin, T. H.; Belser, M.; Tzeng, Y. Pulsed microwave plasma etching of polymers in oxygen and nitrogen for microelectronic applications Plasma Science, IEEE Transactions 1988, 16, 631-637
    • (1988) Plasma Science, IEEE Transactions , vol.16 , pp. 631-637
    • Lin, T.H.1    Belser, M.2    Tzeng, Y.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.