Kinetic characteristics of the SAW humidity sensor partially coated with graphene oxide thin film

Chip in Curitiba 2013 - SBMicro 2013: 28th Symposium on Microelectronics Technology and Devices

Volumn , Issue , 2013, Pages

  Balashov, S M ^a   Balachova, O V ^a   Braga, A V U ^a   Bazetto, M C Q ^a   Pavani Filho, A ^a   Moshkalev, S ^b  

^a Center for Information Technology Renato Archer CTI   (Brazil)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

graphene oxide film; humidity sensor; SAW atomizer; SAW sensor

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ADSORPTION; FILM PREPARATION; HUMIDITY SENSORS; INTEGRAL EQUATIONS; KINETICS; MICROELECTRONICS; OXIDE FILMS; THIN FILMS;

ADSORPTION KINETICS; AQUEOUS DISPERSIONS; GRAPHENE OXIDE FILMS; KINETIC CHARACTERISTICS; LEAST-SQUARES FITTINGS; SAW SENSORS; SHORT RESPONSE TIME; SURFACE ACOUSTIC WAVE ATOMIZER;

GRAPHENE;

EID: 84893476959     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SBMicro.2013.6676163     Document Type: Conference Paper

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