Humidity sensing behaviors of graphene oxide-silicon bi-layer flexible structure

Sensors and Actuators, B: Chemical

Volumn 161, Issue 1, 2012, Pages 1053-1058

  Yao, Yao ^a   Chen, Xiangdong ^a   Guo, Huihui ^a   Wu, Zuquan ^a   Li, Xiaoyu ^a  

^a SOUTHWEST JIAOTONG UNIVERSITY   (China)

Author keywords

Bi layer structure; Graphene oxide; Humidity sensor; Silicon flexible microbridge

Indexed keywords

BI-LAYER; BI-LAYER STRUCTURE; HIGH HUMIDITY; HUMID ENVIRONMENT; HUMIDITY HYSTERESIS; HUMIDITY SENSING; HUMIDITY SENSING MECHANISM; HUMIDITY SENSING PROPERTY; OUTPUT VOLTAGES; OXIDE THIN FILMS; PIEZO-RESISTIVE; RELATIVE HUMIDITY RANGE; RESPONSE PROPERTIES; SILICON MEMBRANES; SILICON MICRO-BRIDGE; SPIN-COATING METHOD; THIN FILMS-THICKNESS;

ATMOSPHERIC HUMIDITY; FLEXIBLE STRUCTURES; GRAPHENE; HUMIDITY SENSORS; HYSTERESIS; SEMICONDUCTING SILICON COMPOUNDS; SOLIDS; THIN FILMS;

OXIDE FILMS;

EID: 84856225617     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.12.007     Document Type: Article

References (25)

1. P.J. Schubert, and J.H. Nevin A polyimide-based capacitive humidity sensor IEEE Trans. Electron. Devices 32 1985 1220 1223
2. 2Si substrate Sens. Actuator B 19 1994 551 553
3. Y. Zhang, K. Yu, D. Jiang, Z. Zhu, H. Geng, and L. Luo Zinc oxide nanorod and nanowire for humidity sensor Appl. Surf. Sci. 242 2005 212 217 (Pubitemid 40086060)
4. X.F. Wang, B. Ding, J.Y. Yu, M. Wang, and F. Pan A highly sensitive humidity sensor based on a nanofibrous membrane coated quartz crystal microbalance Nanotechnology 21 2010 055502
5. M. Penza, and V.I. Anisimkin Surface acoustic wave humidity sensor using polyvinyl-alcohol film Sens. Actuator A 76 1999 162 166 (Pubitemid 30543250)
6. F. Arregui, Y.J. Liu, I. Matias, and R. Claus Optical fiber humidity sensor using a nano Fabry-Perot cavity formed by the ionic self-assembly method Sens. Actuator B 59 1999 54 59 (Pubitemid 30514421)
7. G. Gerlach, and K. Sager A piezoresistive humidity sensor Sens. Actuator A 43 1994 181 184
8. D.R. Southworth, L.M. Bellan, Y. Linzon, H.G. Craighead, and J.M. Parpia Stress-based vapor sensing using resonant microbridges Appl. Phys. Lett. 96 2010 163503
9. G.Y. Chen, T. Thundat, E.A. Wachter, and R.J. Warmack Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers J. Appl. Phys. 77 1995 3618 3622
10. S. Singamaneni, M.E. McConney, M.C. LeMieux, H. Jiang, J.O. Enlow, T.J. Bunning, R.R. Naik, and V.V. Tsukruk Polymer-silicon flexible structures for fast chemical vapor detection Adv. Mater. 19 2007 4248 4255 (Pubitemid 350254806)
11. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, and A.A. Firsov Electric field effect in atomically thin carbon films Science 306 2004 666 669 (Pubitemid 39440910)
12. Y. Dan, Y. Lu, N.J. Kybert, Z. Luo, A.T.C. Johnson, I.V. Grigorieva, and A.A. Firsov Intrinsic response of graphene vapor sensors Nano Lett. 9 2009 1472 1475
13. G. Lu, L. Ocola, and J. Chen Gas detection using low-temperature reduced graphene oxide sheets Appl. Phys. Lett. 94 2009 083111
14. G. Lu, L. Ocola, and J. Chen Reduced graphene oxide for room-temperature gas sensors Nanotechnology 20 2009 445502
15. H.Y. Jeong, J.Y. Kim, J.W. Kim, J.O. Hwang, J.E. Kim, J.Y. Lee, T.H. Yoon, B.J. Cho, S.O. Kim, R.S. Ruoff, and S.Y. Choi Graphene oxide thin films for flexible nonvolatile memory applications Nano Lett. 10 2010 4381 4386
16. T. Kim, Y. Gao, O. Acton, H. Yip, H. Ma, H.Z. Chen, and A.K. Jen Graphene oxide nanosheets based organic field effect transistor for nonvolatile memory applications Appl. Phys. Lett. 97 2010 023310
17. 2/graphene oxide nanocomposite Talanta 82 2010 1637 1641
18. N. Medhekar, A. Ramasubramaniam, R.S. Ruoff, and V. Shenoy Hydrogen bond networks in graphene oxide composite paper: structure and mechanical properties ACS Nano 4 2010 2300 2306
19. M. Acik, C. Mattevi, C. Gong, G. Lee, K. Cho, M. Chhowalla, and Y. Chabal The role of intercalated water in multilayered graphene oxide ACS Nano 4 2010 5861 5868
20. F. Barroso-Bujans, S. Cerveny, A. Alegría, and J. Colmenero Sorption and desorption behavior of water and organic solvents from graphite oxide Carbon 48 2010 3277 3286
21. S. Park, J. An, J. Suk, and R.S. Ruoff Graphene-based actuators Small 6 2010 210 212
22. W.S. Hummers, and R. Offeman Jr. Preparation of graphitic oxide J. Am. Chem. Soc. 80 1958 1339
23. M. Zimmermann, T. Volden, K. Kirstein, S. Hafizovic, J. Lichtenberg, and A. Hierlemann A CMOS-based sensor array system for chemical and biochemical applications Proceedings of the 31st European Solid-State Circuits Conference, Grenoble, France 2005 IEEE Washington, DC 343 346 (Pubitemid 44472366)
24. S. Stankovich, R.D. Piner, S.T. Nguyen, and R.S. Ruoff Synthesis and exfoliation of isocyanate-treated graphene oxide nanoplatelets Carbon 44 2006 3342 3347 (Pubitemid 44634397)
25. A. Lerf, A. Buchsteiner, B. Pieper, S. Schöttl, I. Dekany, T. Szabo, and H.P. Boehm Hydration behavior and dynamics of water molecules in graphite oxide J. Phys. Chem. Solids 67 2006 1106 1110 (Pubitemid 43850504)