Development of piezoelectric MEMS vibration energy harvester using (100) oriented BiFeO3 ferroelectric film

Journal of Physics: Conference Series

Volumn 476, Issue 1, 2013, Pages

  Murakami, S ^a   Yoshimura, T ^b   Satoh, K ^a   Wakazono, K ^b   Kariya, K ^b   Fujimura, N ^b  

^a OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY CONVERSION; ENERGY HARVESTING; FERROELECTRIC FILMS; NANOTECHNOLOGY; PIEZOELECTRICITY; SOL-GEL PROCESS; SOL-GELS;

MAXIMUM OUTPUT POWER DENSITIES; MICRO-ELECTRICAL MECHANICAL SYSTEMS; PIEZOELECTRIC FILM; PIEZOELECTRIC MEMS; PIEZOELECTRIC VIBRATION; RESONANCE FREQUENCIES; UNIMORPH STRUCTURE; VIBRATION ENERGY HARVESTERS;

VIBRATIONS (MECHANICAL);

EID: 84891821754     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/476/1/012007     Document Type: Conference Paper

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