Slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

Optics Express

Volumn 21, Issue 26, 2013, Pages 32468-32483

  Seidler, Paul ^a   Lister, Kevin ^a   Drechsler, Ute ^a   Hofrichter, Jens ^a   Stöferle, Thilo ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS;

HIGH QUALITY FACTORS; MODE VOLUME; PHOTONIC CRYSTAL NANOBEAM; QUALITY FACTORS; SILICON PHOTONIC CRYSTALS; STRONG CONFINEMENT; THERMOOPTICS; VOLUME RATIO;

PHOTONIC CRYSTALS;

EID: 84891796428     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.032468     Document Type: Article

References (51)

1. K. J. Vahala, "Optical microcavities," Nature 424(6950), 839-846 (2003
2. D. A. B. Miller, "Device Requirements for Optical Interconnects to Silicon Chips," Proc. IEEE 97(7), 1166- 1185 (2009
3. S. Noda, "Applied Physics. Seeking the Ultimate Nanolaser," Science 314(5797), 260-261 (2006
4. K. Takeda, T. Sato, A. Shinya, K. Nozaki, W. Kobayashi, H. Taniyama, M. Notomi, K. Hasebe, T. Kakitsuka, and S. Matsuo, "Few-fJ/bit data transmissions using directly modulated lambda-scale embedded active region photonic-crystal lasers," Nat. Photonics 7(7), 569-575 (2013
5. Y. Takahashi, Y. Inui, M. Chihara, T. Asano, R. Terawaki, and S. Noda, "A micrometre-scale Raman silicon laser with a microwatt threshold," Nature 498(7455), 470-474 (2013
6. B. Schmidt, Q. Xu, J. Shakya, S. Manipatruni, and M. Lipson, "Compact electro-optic modulator on silicon-oninsulator substrates using cavities with ultra-small modal volumes," Opt. Express 15(6), 3140-3148 (2007
7. D. J. Ripin, K.-Y. Lim, G. S. Petrich, P. R. Villeneuve, S. Fan, E. R. Thoen, J. D. Joannopoulos, E. P. Ippen, and L. A. Kolodziejski, "One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/AlxOy semiconductor waveguides," J. Lightwave Technol. 17(11), 2152-2160 (1999
8. A. R. M. Zain, M. Gnan, H. M. H. Chong, M. Sorel, and R. M. De La Rue, "Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides With Large Resonance Quality-Factor and High Transmission," IEEE Photon. Technol. Lett. 20(1), 6-8 (2008
9. P. B. Deotare, M. W. McCutcheon, I. W. Frank, M. Khan, and M. Lončar, "High quality factor photonic crystal nanobeam cavities," Appl. Phys. Lett. 94(12), 121106 (2009
10. M. Galli, D. Gerace, K. Welna, T. F. Krauss, L. O'Faolain, G. Guizzetti, and L. C. Andreani, "Low-power continuous-wave generation of visible harmonics in silicon photonic crystal nanocavities," Opt. Express 18(25), 26613-26624 (2010
11. M. Lončar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82(26), 4648-4650 (2003
12. S.-H. Kwon, T. Sünner, M. Kamp, and A. Forchel, "Optimization of photonic crystal cavity for chemical sensing," Opt. Express 16(16), 11709-11717 (2008
13. A. Di Falco, L. O'Faolain, and T. F. Krauss, "Chemical sensing in slotted photonic crystal heterostructure cavities," Appl. Phys. Lett. 94(6), 063503 (2009
14. T. J. Kippenberg and K. J. Vahala, "Cavity Opto-Mechanics," Opt. Express 15(25), 17172-17205 (2007
15. T. J. Kippenberg and K. J. Vahala, "Cavity Optomechanics: Back-Action at the Mesoscale," Science 321(5893), 1172-1176 (2008
16. M. Eichenfield, J. Chan, R. M. Camacho, K. J. Vahala, and O. Painter, "Optomechanical crystals," Nature 462(7269), 78-82 (2009
17. M. Davanço, J. Chan, A. H. Safavi-Naeini, O. Painter, and K. Srinivasan, "Slot-mode-coupled optomechanical crystals," Opt. Express 20(22), 24394-24410 (2012
18. A. H. Safavi-Naeini, S. Gröblacher, J. T. Hill, J. Chan, M. Aspelmeyer, and O. Painter, "Squeezed light from a silicon micromechanical resonator," Nature 500(7461), 185-189 (2013
19. H. Mabuchi and A. C. Doherty, "Cavity Quantum Electrodynamics: Coherence in Context," Science 298(5597), 1372-1377 (2002
20. K. Hennessy, A. Badolato, M. Winger, D. Gerace, M. Atatüre, S. Gulde, S. Fält, E. L. Hu, and A. Imamoǧlu, "Quantum nature of a strongly coupled single quantum dot-cavity system," Nature 445(7130), 896-899 (2007
21. J. D. Thompson, T. G. Tiecke, N. P. de Leon, J. Feist, A. V. Akimov, M. Gullans, A. S. Zibrov, V. Vuletić, and M. D. Lukin, "Coupling a Single Trapped Atom to a Nanoscale Optical Cavity," Science 340(6137), 1202-1205 (2013
22. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure," Opt. Lett. 29(11), 1209-1211 (2004
23. C. A. Barrios and M. Lipson, "Electrically driven silicon resonant light emitting device based on slotwaveguide," Opt. Express 13(25), 10092-10101 (2005
24. J. T. Robinson, C. Manolatou, L. Chen, and M. Lipson, "Ultrasmall Mode Volumes in Dielectric Optical Microcavities," Phys. Rev. Lett. 95(14), 143901 (2005
25. A. Gondarenko and M. Lipson, "Low modal volume dipole-like dielectric slab resonator," Opt. Express 16(22), 17689-17694 (2008
26. P. Yu, B. Qi, X. Jiang, M. Wang, and J. Yang, "Ultrasmall-V high-Q photonic crystal nanobeam microcavities based on slot and hollow-core waveguides," Opt. Lett. 36(8), 1314-1316 (2011
27. T. Yamamoto, M. Notomi, H. Taniyama, E. Kuramochi, Y. Yoshikawa, Y. Torii, and T. Kuga, "Design of a high-Q air-slot cavity based on a width-modulated line-defect in a photonic crystal slab," Opt. Express 16(18), 13809-13817 (2008
28. J. D. Ryckman and S. M. Weiss, "Low mode volume slotted photonic crystal single nanobeam cavity," Appl. Phys. Lett. 101(7), 071104 (2012
29. J. Gao, J. F. McMillan, M.-C. Wu, J. Zheng, S. Assefa, and C. W. Wong, "Demonstration of an air-slot modegap confined photonic crystal slab nanocavity with ultrasmall mode volumes," Appl. Phys. Lett. 96(5), 051123 (2010
30. J. Vučković, M. Lončar, H. Mabuchi, and A. Scherer, "Optimization of the Q Factor in Photonic Crystal Microcavities," IEEE J. Quantum Electron. 38(7), 850-856 (2002
31. Y. Akahane, T. Asano, B.-S. Song, and S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425(6961), 944-947 (2003
32. Y. Li, J. Zheng, J. Gao, J. Shu, M. S. Aras, and C. W. Wong, "Design of dispersive optomechanical coupling and cooling in ultrahigh-Q/V slot-type photonic crystal cavities," Opt. Express 18(23), 23844-23856 (2010
33. A. Taflove and S. C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method, Third Edition (Artech House, 2005
34. S. G. Johnson and J. D. Joannopoulos, "Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis," Opt. Express 8(3), 173-190 (2001
35. A. F. Oskooi, D. Roundy, M. Ibanescu, P. Bermel, J. D. Joannopoulos, and S. G. Johnson, "MEEP: A flexible free-software package for electromagnetic simulations by the FDTD method," Comput. Phys. Commun. 181(3), 687-702 (2010
36. P. Lalanne and J. P. Hugonin, "Bloch-Wave Engineering for High-Q, Small-V Microcavities," IEEE J. Quantum Electron. 39(11), 1430-1438 (2003
37. C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, "Modal- reflectivity enhancement by geometry tuning in Photonic Crystal microcavities," Opt. Express 13(1), 245-255 (2005
38. R. Waldhäusl, B. Schnabel, E.-B. Kley, and A. Bräuer, "Efficient focusing polymer waveguide grating couplers," Electron. Lett. 33(7), 623-624 (1997
39. S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, "A 90nm CMOS Integrated Nano-Photonics Technology for 25 Gbps WDM Optical Communications Applications," in Proceedings of 2012 IEEE International Electron Devices Meeting (IEDM) (Institute of Electrical and Electronics Engineers, 2012), pp. 809-811.
40. T. Wahlbrink, T. Mollenhauer, Y. M. Georgiev, W. Henschel, J. K. Efavi, H. D. B. Gottlob, M. C. Lemme, H. Kurz, J. Niehusmann, and P. Bolivar, "Highly selective etch process for silicon-on-insulator nano-devices," Microelectron. Eng. 78-79, 212-217 (2005
41. C. Welch, "Nanoscale Etching in Inductively Coupled Plasmas" (Oxford Instruments White Paper, 2011).http://www.isnc.cnsi.ucla.edu/pdf/ Etching-Whitepaper.pdf
42. J. D. Joannopoulos, S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic Crystals, Molding the Flow of Light (PrincetonUniversity Press, 2008), Chap. 10.
43. Y. Xu, Y. Li, R. K. Lee, and A. Yariv, "Scattering-theory analysis of waveguide-resonator coupling," Phys. Rev. E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 62(5 5 Pt B), 7389-7404 (2000
44. V. B. Braginsky, M. L. Gorodetsky, and V. S. Ilchenko, "Quality-Factor and Nonlinear Properties of Optical Whsipering-Gallery Modes," Phys. Lett. A 137(7-8), 393-397 (1989
45. V. S. Il'chenko and M. L. Gorodetskii, "Thermal Nonlinear Effects in Optical Whispering Gallery Microresonators," Laser Phys. 2, 1004-1009 (1992
46. T. Carmon, L. Yang, and K. J. Vahala, "Dynamical thermal behavior and thermal self-stability of microcavities," Opt. Express 12(20), 4742-4750 (2004
47. H. Rokhsari, S. M. Spillane, and K. J. Vahala, "Loss characterization in microcavities using the thermal bistability effect," Appl. Phys. Lett. 85(15), 3029-3031 (2004
48. P. E. Barclay, K. Srinivasan, and O. Painter, "Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper," Opt. Express 13(3), 801-820 (2005
49. M. Notomi, A. Shinya, S. Mitsugi, G. Kira, E. Kuramochi, and T. Tanabe, "Optical bistable switching action of Si high-Q photonic-crystal nanocavities," Opt. Express 13(7), 2678-2687 (2005
50. T. Uesugi, B.-S. Song, T. Asano, and S. Noda, "Investigation of optical nonlinearities in an ultra-high-Q Si nanocavity in a two-dimensional photonic crystal slab," Opt. Express 14(1), 377-386 (2006
51. J. D. Joannopoulos, S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic Crystals, Molding the Flow of Light (PrincetonUniversity Press, 2008), Chap. 2.