Printed micro-hotplates on flexible substrates for gas sensing

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 1059-1062

  Camara, M ^a   Molina Lopez, F ^a   Danesh, E ^b   Mattana, G ^a   Bontempi, A ^c   Teyssieux, D ^c   Thiery, L ^c   Breuil, P ^d   Pijolat, C ^e   Persaud, K ^b   Briand, D ^a   De Rooij, N F ^a  

^a EPFL   (Switzerland)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

^c FEMTO ST INSTITUTE   (France)

^d ECOLE DES MINES DE SAINT ETIENNE   (France)

^e CENTRE SPIN   (France)

Author keywords

ammonia; conducting polymers; flexible substrates; gas sensors; Polymeric hotplates

Indexed keywords

AMMONIA SENSORS; DIELECTRIC INTERLAYERS; FABRICATION AND CHARACTERIZATIONS; FLEXIBLE SUBSTRATE; GAS SENSING APPLICATIONS; HOT PLATES; INTER-DIGITATED ELECTRODES; SENSING PLATFORMS;

ACTUATORS; AMMONIA; CHEMICAL DETECTION; CHEMICAL SENSORS; CONDUCTING POLYMERS; MICROSYSTEMS; PHOTORESISTS; POLYANILINE; SILVER; SOLID-STATE SENSORS;

GAS DETECTORS;

EID: 84891680641     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6626953     Document Type: Conference Paper

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