Graphene SOI CMOS sensors for detection of PPB levels of NO2 in air

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 2055-2058

  Gardner, J W ^a   Cole, M T ^b   De Luca, A ^b   Clement, P ^c   Llobet, E ^c   Ali, S Z ^d   Udrea, F ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^d AMS AG   (Austria)

Author keywords

chemical sensor; gas sensor; Graphene

Indexed keywords

ALTERNATIVE TECHNOLOGIES; ALUMINA SUBSTRATES; AUTOMOTIVE MARKETS; CROSS SENSITIVITY; REPRODUCIBILITIES; RESISTIVE GAS SENSORS; SENSING ELEMENTS; TEMPORAL STABILITY;

ACTUATORS; ALUMINA; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; INTERNAL COMBUSTION ENGINES; MICROSYSTEMS; NITROGEN OXIDES; SOLID-STATE SENSORS;

GRAPHENE;

EID: 84891671648     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627203     Document Type: Conference Paper

References (4)

1. S.Z. Ali, F. Udrea, W.I. Milne, and J.W. Gardner, "Tungsten-based SOI microhotplates for smart gas sensors", J. MEMS Systems, vol. 17, pp. 1408-1417, 2008.
2. S. Santra, S.Z. Ali, P. Guha, G. Zhong, J. Robertson, J. Covington, W.I. Milne, J.W. Gardner and F. Udrea, "Post-CMOS wafer level growth of carbon nanotubes for low cost microsensors - a proof of concept", Nanotechnology, vol. 21, pp. 1-7, 2010.
3. J.W. Gardner, "CMOS based gas sensors: progress and problems", EC FP7 COST nanoTP Workshop, Berlin, Germany, 18-19 March 2010
4. R. Leghrib, A. Felten, F. Demoisson, F. Renier, J.J. Pireaux, E. Llobet, "Room-temperature, selective detection of benzene at trace levels using plasmatreated metal-decorated multi-walled carbon nanotubes", Carbon, vol. 46, pp. 3477-3484, 2010.