Enhanced light trapping in polycrystalline silicon thin-film solar cells using plasma-etched submicron textures

Solar Energy Materials and Solar Cells

Volumn 122, Issue , 2014, Pages 146-151

  Huang, Ying ^a   Sahraei, Nasim ^a   Widenborg, Per I ^a   Marius Peters, Ian ^a   Dalapati, Goutam Kumar ^b   Iskander, Aneesa ^b   Aberle, Armin G ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Light trapping; Plasma etching; Scalar scattering theory; Silicon texture; Thin film solar cells

Indexed keywords

CURRENT ENHANCEMENT; LIGHT-TRAPPING; MICROMETER-SCALE; PHOTON DENSITIES; POLYCRYSTALLINE SILICON (POLY-SI); SCALAR SCATTERING; SCATTERING PROPERTY; THIN-FILM SOLAR CELLS;

GLASS; PLASMA ETCHING; POLYSILICON; SCATTERING; TEXTURES;

SILICON SOLAR CELLS;

EID: 84890929345     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2013.11.033     Document Type: Article

References (29)

1. A.G. Aberle Progress with polycrystalline silicon thin-film solar cells on glass at UNSW J. Cryst. Growth 287 2006 386 390 (Pubitemid 43069662)
2. M.A. Green, P.A. Basore, N. Chang, D. Clugston, R. Egan, R. Evans, D. Hogg, S. Jarnason, M. Keevers, P. Lasswell, J. O'Sullivan, U. Schubert, A. Turner, S.R. Wenham, and T. Young Crystalline silicon on glass (CSG) thin-film solar cell modules Sol. Energy 77 2004 857 863 (Pubitemid 39605894)
3. P.A. Basore, CSG-1: manufacturing a new polycrystalline silicon PV technology, in: Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, 2006, pp. 2089-2093.
4. T. Matsuyama, K. Wakisaka, M. Kameda, M. Tanaka, T. Matsuoka, S. Tsuda, S. Nakano, Y. Kishi, and Y. Kuwano Preparation of high-quality n-type poly-Si films by the solid phase crystallization (SPC) method Jpn. J. Appl. Phys. 29 1990 2327 2331
5. D. Song, D. Inns, A. Straub, M.L. Terry, P. Campbell, and A.G. Aberle Solid phase crystallized polycrystalline thin-films on glass from evaporated silicon for photovoltaic applications Thin Solid Films 513 2006 356 363 (Pubitemid 44202337)
6. A.G. Aberle, P.I. Widenborg, N. Chuangsuwanich, Glass Texturing, NewSouth Innovations Pty Limited, Rupert Myers Building, Gate 14, Barker Street, Sydney, New South Wales, AU, European Patent EP1613562B1, 2011.
7. M. Keevers, T.L. Young, U. Schubert, R. Evans, R.J.Egan, M.A. Green, 10% Efficient CSG minimodules, in: Proceedings of the 22nd European Photovoltaic Solar Energy Conference, Milan, 2007, p. 1783.
8. P.J. Gress, P.I. Widenborg, S. Varlamov, and A.G. Aberle Wire bonding as a cell interconnection technique for polycrystalline silicon thin-film solar cells on glass Prog. Photovolt.: Res. Appl. 18 2010 221 228
9. T. Soderstrom, Q. Wang, K. Omaki, O. Kunz, D. Ong, and S. Varlamov Light confinement in e-beam evaporated thin film polycrystalline silicon solar cells Phys. Status Solidi - Rapid Res. Lett. 5 2011 181 183
10. D.S. Ruby, W.L. Wilbanks, C.B. Fleddermann, M.D. Rosenblum, S. Roncin, S. Narayanan, Optimization of plasma deposition and etching processes for commercial multicrystalline silicon solar cells, in: Conference Record of the 25th IEEE Photovoltaic Specialists Conference, 1996, pp. 637-640.
11. M. Schnell, R. Ludemann, S. Schaefer, Plasma surface texturization for multicrystalline silicon solar cells, in: Conference Record of the 28th IEEE Photovoltaic Specialists Conference, 2000, pp. 367-370.
12. O. Schultz, G. Emanuel, W. Glunz, G.P. Willeke, Texturing of multicrystalline silicon with acidic wet chemical etching and plasma etching, in: Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, vol. 1362, 2003, pp. 1360-1363.
13. D.H. Macdonald, A. Cuevas, M.J. Kerr, C. Samundsett, D. Ruby, S. Winderbaum, and A. Leo Texturing industrial multicrystalline silicon solar cells Sol. Energy 76 2004 277 283 (Pubitemid 38047642)
14. K.-s. Lee, M.-H. Ha, J.H. Kim, and J.-W. Jeong Damage-free reactive ion etch for high-efficiency large-area multi-crystalline silicon solar cells Sol. Energy Mater. Sol. Cells 95 2011 66 68
15. H. Hidayat, A. Kumar, F. Law, C. Ke, P.I. Widenborg, and A.G. Aberle Impact of rapid thermal annealing temperature on non-metallised polycrystalline silicon thin-film diodes on glass Thin Solid Films 534 2013 629 635
16. H. Hidayat, P.I. Widenborg, A. Kumar, F. Law, and A.G. Aberle Static large-area hydrogenation of polycrystalline silicon thin-film solar cells on glass using a linear microwave plasma source IEEE J.Photovolt. 2 2012 580 585
17. Y. Huang, P.I. Widenborg, A.G. Aberle, Up-scaling of the AIT glass texturing method to pilot line-scale borosilicate glass sheets, in: Proceedings of 26th EUPVSEC, Hamburg, 2011, pp. 2750-2753.
18. Y. Huang, F. Law, P.I. Widenborg, and A.G. Aberle Crystalline silicon growth in the aluminium-induced glass texturing process J. Cryst. Growth 361 2012 121 128
19. M. Burgelman, J. Verschraegen, S. Degrave, and P. Nollet Modeling thin-film PV devices Prog. Photovolt.: Res. Appl. 12 2004 143 153 (Pubitemid 38460412)
20. M. Zeman, and J. Krc Optical and electrical modeling of thin-film silicon solar cells J. Mater. Res. 23 2008 889 898 (Pubitemid 351634238)
21. G. Jin, P.I. Widenborg, P. Campbell, and S. Varlamov Lambertian matched absorption enhancement in PECVD poly-Si thin film on aluminum induced textured glass superstrates for solar cell applications Prog. Photovolt.: Res. Appl. 18 2010 582 589
22. D. Domine, F.-J. Haug, C. Battaglia, and C. Ballif Modeling of light scattering from micro- and nanotextured surfaces J. Appl. Phys. 107 2010 044504
23. K. Jäger, M. Fischer, R.A.C.M.M. Van Swaaij, and M. Zeman A scattering model for nano-textured interfaces and its application in opto-electrical simulations of thin-film silicon solar cells J. Appl. Phys. 111 2012
24. J.E. Harvey, C.L. Vernold, A. Krywonos, and P.L. Thompson Diffracted radiance: a fundamental quantity in nonparaxial scalar diffraction theory Appl. Opt. 38 1999 6469 6481 (Pubitemid 129567550)
25. D. Inns ALICIA polycrystalline silicon thin-film solar cells (Ph.D. thesis) 2007 UNSW
26. C. Battaglia, L. Erni, M. Boccard, L. Barraud, J. Escarre, K. Soderstrom, G. Bugnon, A. Billet, L. Ding, M. Despeisse, F.-J. Haug, S. De Wolf, and C. Ballif Micromorph thin-film silicon solar cells with transparent high-mobility hydrogenated indium oxide front electrodes J. Appl. Phys. 109 2011 114501 114507
27. P. Campbell, P.I. Widenborg, A.B. Sproul, A.G. Aberle, surface textures for large-grained poly-silicon thin-film solar cells on glass using the AIT method, in: PVSEC-15, Shanghai, China, 2005, pp. 859-860.
28. M. Boccard, C. Battaglia, S. Hänni, K. Söderström, J. Escarré, S. Nicolay, F. Meillaud, M. Despeisse, and C. Ballif Multiscale transparent electrode architecture for efficient light management and carrier collection in solar cells Nano Lett. 12 2012 1344 1348
29. Hongtao Cui Light management for polycrystalline Si thin-film solar cells on glass superstrates (Ph.D. thesis) 2012 UNSW