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Volumn , Issue , 2007, Pages 1-24

Nanofabrication Techniques

Author keywords

Nanoelectromechanical systems; Nanosphere lithography; Positive and negative photoresist materials

Indexed keywords


EID: 84890756348     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470185834.ch1     Document Type: Chapter
Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.