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Volumn , Issue , 2009, Pages 261-309

Structure Solution

Author keywords

Auger electron backscattering factor; Calculated Auger line scans for Al on Si; Electron probe microanalyser (EPMA); Monte Carlo simulations; SAM spatial resolution and SEM; Spatial distribution of auger electrons; Spatial resolution

Indexed keywords


EID: 84890651474     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9781444305487.ch7     Document Type: Chapter
Times cited : (15)

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