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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 110-115

Sub-micron structuring of solid targets with femtosecond laser pulses

(6) Korte, F a Nolte, S b Chichkov, B N a Fallnich, C a Tunnermann A b Welling, H a

a LASER ZENTRUM HANNOVER E V (Germany)

b FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

Author keywords

Microstructure fabrication; Ultrafast lasers

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTROMAGNETIC PULSE; FEMTOSECOND LASERS; IMAGING TECHNIQUES; LASER ABLATION; LASER APPLICATIONS; MICROELECTRONICS; SUBSTRATES; ULTRAFAST LASERS;

FEMTOSECOND PULSE LASER ABLATION; GLASS SUBSTRATES; LASER-PULSE ENERGY; MICROSTRUCTURE FABRICATION; SOLID TARGETS; STRUCTURE SIZES; THIN METAL FILMS; TIGHT FOCUSING;

LASER PULSES;

EID: 84889372187 PISSN: 0277786X EISSN: 1996756X Source Type: Conference Proceeding
DOI: 10.1117/12.432502 Document Type: Conference Paper

Times cited : (1)

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