Dependences of sputtering times on the structural and electrical properties of ZnO/Ag/ZnO thin films on PET by DC sputtering

IEEE Transactions on Nanotechnology

Volumn 12, Issue 6, 2013, Pages 991-995

  Kim, Yun Hae ^a   Lee, Jin Woo ^a   Murakami, Ri Ichi ^b  

^a Korea Maritime University   (South Korea)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

DC sputtering; Polyethylene terephthalate; Thin films; Transparent conduction oxide; Zinc oxide

Indexed keywords

ALTERNATIVE MATERIALS; DC MAGNETRON SPUTTERING; DC SPUTTERING; POLYETHYLENE TEREPHTHALATES (PET); STRUCTURAL AND ELECTRICAL PROPERTIES; TRANSPARENT CONDUCTIVE OXIDE FILMS; TRANSPARENT CONDUCTIVE OXIDE THIN FILM; TRANSPARENT ELECTRODE MATERIALS;

MULTILAYER FILMS; OXIDE FILMS; POLYETHYLENE TEREPHTHALATES; THIN FILMS; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 84888186687     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2013.2274596     Document Type: Article

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