Condition monitoring and operational decision making in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 4, 2013, Pages 454-464

  Cholette, Michael E ^a   Celen, Merve ^b   Djurdjanovic, Dragan ^b   Rasberry, John D ^c  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

^b The University of Texas at Austin   (United States)

^c Thermal Energetics Sherwood   (United States)

Author keywords

Condition monitoring; Condition based maintenance; Preventive maintenance; Semiconductor manufacturing

Indexed keywords

CONDITION BASED MAINTENANCE; DEGRADATION PROCESS; MONITORING METHODS; OPERATIONAL DECISION MAKING; OPTIMIZATION PROCEDURES; SEMICONDUCTOR FABRICATION PLANT; SEMICONDUCTOR MANUFACTURING; SIMULATED OPERATION;

CONDITION MONITORING; DECISION MAKING; EQUIPMENT; PREVENTIVE MAINTENANCE;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84887970988     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2268861     Document Type: Article

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