Synthesis of ZnO thin films and their application as humidity sensors

Microsystem Technologies

Volumn 19, Issue 11, 2013, Pages 1737-1743

  Hsu, Nai Feng ^a   Chang, Ming ^b   Lin, Chia Hung ^b  

^a Army Academy   (Taiwan)

^b CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMUM SENSITIVITY; ROOM TEMPERATURE; SENSOR RESISTANCE; SI WAFER; VAPOR-SOLID; ZNO THIN FILM;

HUMIDITY SENSORS; METALLIC FILMS; SILICON WAFERS; VAPORS;

OPTICAL FILMS;

EID: 84887226092     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1830-z     Document Type: Conference Paper

References (27)

1. Asar N, Erol A, Okur S, Arikan MC (2012) Morphology-dependent humidity adsorption kinetics of ZnO nanostructures. Sens Actuat A 187:37-42. doi: 10.1016/j.sna.2012.08.019
2. Chang SP, Chang SJ, Lu CY, Li MJ, Hsu CL, Chiou YZ, Hsueh TJ, Chen IC (2010) A ZnO nanowire-based humidity sensor. Superl Micros 47:772-778. doi: 10.1016/j.spmi.2010.03.006
3. Chauhan P, Annapoomi S, Trikha SK (1999) Humidity-sensing properties of nanocrystalline haematite thin films prepared by sol-gel processing. Thin Solid Films 346:266-268. doi: 10.1016/S0040-6090(98)01771-4
4. Chen Z, Lu C (2005) Humidity sensors: a review of materials and mechanisms. Sen Lett 3:274-295. doi: 10.1166/sl.2005.045
5. Chen Y, Bagnall DM, Koh H, Park K, Hiraga K, Zhu Z, Yao T (1998) Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire: growth and characterization. J Appl Phys 84:3912-3918. doi: 10.1063/1.368595
6. Chen LT, Lee CY, Cheng WH (2008) MEMS-based humidity sensor with integrated temperature compensation mechanism. Sens Actuat A 147:522-528. doi: 10.1016/j.sna.2008.06.033
7. Chou KS, Lee TK, Liu FJ (1999) Sensing mechanism of a porous ceramic as humidity sensors. Sens Actuat B 56:106-111. doi: 10.1016/S0925-4005(99)00187-2
8. Ernsberger FM (1983) The nonconformist ion. J Am Ceram Soc 11:747-750. doi: 10.1111/j.1151-2916.1983.tb10555.x
9. Erol A, Okur S, Yagmurchukardes N, Ankan MC (2011) Humidity-sensing properties of a ZnO nanowire film as measured with a QCM. Sens Actuat B 152:115-120. doi: 10.1016/j.snb.2010.09.005
10. Fang F, Futter J, Markwitz A, Kennedy J (2009) UV and humidity sensing properties of ZnO nanorods prepared by the arc discharge method. Nanotechnology 20:245502. doi: 10.1088/0957-4484/20/24/245502
11. Hsueh HT, Hsueh TJ, Chang SJ, Hung FY, Hsu CL, Dai BT, Lam KT, Wen KH (2012) A flexible ZnO nanowire-based humidity sensor. IEEE Trans Nanotechnol 11:520-525. doi: 10.1109/TNANO.2011.2168975
12. Kim MS, Kim TH, Kim DY, Lee DY, Kim SO, Leem JY (2012) Effects of annealing atmosphere and temperature on properties of ZnO thin films on porous silicon grown by plasma-assisted molecular beam epitaxy. Electron Mater Lett 8:123-129. doi: 10.1007/s13391-012-1089-z
13. Kulwicki BM (1991) Humidity sensors. J Am Ceram Soc 74:697-708. doi: 10.1111/j.1151-2916.1991.tb06911.x
14. Louchev OA, Sato Y (1999) Nanotube self-organization: formation by step-flow growth. Appl Phys Lett 74:194-196. doi: 10.1063/1.123290
15. Lv J, Gong W, Huang K, Zhu J, Meng F, Song X, Sun Z (2011) Effect of annealing temperature on photocatalytic activity of ZnO thin films prepared by sol-gel method. Super Micro 50:98-106. doi: 10.1016/j.spmi.2011.05.003
16. Mende LS, MacManus-Driscoll JL (2007) ZnO-nanostructures, defects, and devices. Mater Today 10:40-48. doi: 10.1016/S1369-7021(07)70078-0
17. Morrison SR (1982) Semiconductor gas sensors. Sens Actuat 2:329-341. doi: 10.1016/0250-6874(81)80054-6
18. Ohring M (2002) The materials science of thin films. Academic Press, San Diego
19. Qi Q, Zhang T, Yu Q, Wang R, Zeng Y, Liu L, Yang H (2008) Properties of humidity sensing ZnO nanorods-base sensor fabricated by screen-printing. Sens Actuat B 133:638-643. doi: 10.1016/j.snb.2008.03.035
20. Qi Q, Zhang T, Wang S, Zheng X (2009) Humidity sensing properties of KCl-doped ZnO nanofibers with super-rapid response and recovery. Sens Actuat B 137:649-655. doi: 10.1016/j.snb.2009.01.042
21. 2 nanoparticles-polypyrrole-poly-[3-(metha crylamino)propyl] trimethyl ammonium chloride composite materials. Sens Actuat B 129:538-543. doi: 10.1016/j.snb.2007.09.011
22. Tai WP, Oh JH (2002) Humidity sensing behaviors of nanocrystalline Al-doped ZnO thin films prepared by sol-gel process. J Mater Sci: Mater Electron 13:391-394. doi: 10.1023/A:1016084309094
23. Vijayan A, Fuke M, Hawaldar R, Kulkarni M, Amalnerkar D, Aiyer RC (2008) Optical fibre based humidity sensor using Co-polyaniline clad. Sens Actuat B 129:106-112. doi: 10.1016/j.snb.2007.07.113
24. Yao TL, Sun T, Grattan KTV (2008) Fibre-optic sensor technologies for humidity and moisture measurement. Sens Actuat A 144:280-295. doi: 10.1016/j.sna.2008.01.017
25. Zhang J, Li N (2005) Oxidation mechanism of steels in liquid-lead alloys. Oxid Met 63:353-381
26. Zhang Y, Yu K, Jiang D, Zhu Z, Geng H, Luo L (2005) Zinc oxide nanorod and nanowire for humidity sensor. Appl Surf Sci 242:212-217. doi: 10.1016/j.apsusc.2004.08.013
27. Zhang Z, Hu C, Xiong Y, Yang R, Wang ZL (2007) Synthesis of Ba-doped CeO2 nanowires and their application as humidity sensors. Nanotechnology 18:465504. doi: 10.1088/0957-4484/18/46/465504