Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon

Microelectronic Engineering

Volumn 105, Issue , 2013, Pages 107-112

  Shahmoon, Asaf ^a   Limon, Ofer ^b   Businaro, Luca ^c   Ciasca, Gabriele ^c   Azugi, Yhonathan ^b   Gerardino, Annamaria ^c   Zalevsky, Zeev ^a,b  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b BAR ILAN UNIVERSITY   (Israel)

^c CNR   (Italy)

Author keywords

Bragg reflector; Integrated optics; Modulators; Silicon; Waveguide

Indexed keywords

BRAGG REFLECTORS; DISPERSION (WAVES); ELECTRODES; FABRICATION; INTEGRATED OPTICS; MODULATORS; REFLECTION; REFRACTIVE INDEX; SILICON; WAVEGUIDES;

BRAGG-MODULATORS; ELECTROOPTICAL MODULATORS; FABRICATION PROCEDURE; FABRICATION STRATEGIES; INDIUM THIN OXIDES; PATTERNED ELECTRODE; PLASMA DISPERSION EFFECTS; SILICON WAVEGUIDE;

LIGHT MODULATORS;

EID: 84886801927     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2012.12.023     Document Type: Article

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