A micro opto-mechanical displacement sensor based on micro-diffraction gratings: Design and characterization

Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS

Volumn , Issue , 2013, Pages 4714-4717

  Accoto, D ^a   Schena, E ^a   Cidda, M ^a   Francomano, M ^a   Saccomandi, P ^a   Silvestri, S ^a  

^a UNIVERSITY CAMPUS BIO MEDICO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DISPLACEMENT SENSOR; GLASS SUBSTRATES; HIGH SENSITIVITY; OPTICAL COMPONENTS; PERIODIC FUNCTION; RELATIVE DISPLACEMENT; SENSING ELEMENTS; TRANSMITTED LIGHT;

CALIBRATION; DIFFRACTION; LIGHT TRANSMISSION; PHOTODETECTORS; PHOTONS; PLATINUM; SENSORS; SUBSTRATES;

DIFFRACTION GRATINGS;

EID: 84886463056     PISSN: 1557170X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMBC.2013.6610600     Document Type: Conference Paper

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