Nanoelectrode chrome photomask design and specification for biosensor fabrication

Advanced Materials Research

Volumn 795, Issue , 2013, Pages 397-402

  Sharma Rao, B ^a   Hashim, U ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

AutoCAD; Biosensor; Chrome photomask; Clinical diagnostics; Critical dimension; Nano diagnostic; Nanoelectrode; Photolithography

Indexed keywords

AUTOCAD; CLINICAL DIAGNOSTICS; CRITICAL DIMENSION; NANO DIAGNOSTIC; NANOELECTRODE;

COMPUTER AIDED DESIGN; ELECTRON BEAM LITHOGRAPHY; FABRICATION; OPTIMIZATION; PHOTOLITHOGRAPHY; PHOTOMASKS; SIZE DETERMINATION; SPECIFICATIONS;

BIOSENSORS;

EID: 84886265860     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.795.397     Document Type: Conference Paper

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