Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method

Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 2008, Pages

  Hashim, Uda ^a   Salleh, Shahrir ^a   Shohini, Emi Azri ^a   Abd Rahman, Siti Fatimah ^a  

^a UNIVERSITY MALAYSIA PERLIS   (Malaysia)

Author keywords

Biosensor; DNA hybridization; Nanowire; Spacer patterning lithography

Indexed keywords

CAPACITANCE EFFECT; DEOXYRIBONUCLEIC ACIDS; DNA HYBRIDIZATION; DNA HYBRIDIZATION DETECTION; DNA MOLECULES; DOPING PROCESS; DOUBLE-STRANDED DNA (DS-DNA); FABRICATION METHOD; NANOWIRE CONDUCTANCE; SILICON NANOWIRES; SINGLE-STRANDED DNA (SS-DNA); SPACER PATTERNING LITHOGRAPHY;

DNA; FABRICATION; GENES; LITHOGRAPHY; NANOWIRES; ORGANIC ACIDS; SIGNAL TRANSDUCTION;

BIOSENSORS;

EID: 77955121386     PISSN: 10898190     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEMT.2008.5507831     Document Type: Conference Paper

References (7)

1. Arnoldus Jan Storm, Delft University Press, pp. 1-2, 2004.
2. Y. Okahata, T. Kobayashi, K. Tanaka, and M. Shimomura, American Chemical Society, 120, pp. 6165, 1998.
3. http://en.wikipedia.org/wiki/Biosensor
4. International Union of Pure and Applied Chemistry, "biosensor". Compendium of Chemical Terminology Internet edition.
5. Umasankar Yogeswaran and Shen-Ming Chen, 21 January 2008, A Review on the Electrochemical Sensors and Biosensors Composed of Nanowires as Sensing Material
6. Uda Hashim, Muhamad Emi Azri Shohini. 2007. Theoritical and Experimental Study Towards Fabrication of Nanogap Dielectric Biosensor Reversed Spacer Lithography. Proceeding International Conference on Advanced Materials and Nanotechnology, Langkawi Kedah. pp. 57.
7. Muhamad Emi Azri Shohini and Uda Hashim. Nanogap Gold Electrodes by Spacer Lithography for DNA Hybridization Detection. Proceeding Malaysian Technical Universities Conferences on Engineering and Technology. Vol. 2. pp. 292-295. March 8-10 2008, Kangar, Perlis.