Development of digital lithography masking method with focusing mechanism for fabrication of micro-feature on biomachining process

Journal of Mechanical Science and Technology

Volumn 27, Issue 10, 2013, Pages 3017-3022

  Saragih, Agung Shamsuddin ^a   Ko, Tae Jo ^a  

^a Yeungnam University   (South Korea)

Author keywords

Alternative micro fabrication; Biomachining process; Maskless lithography

Indexed keywords

BIOMACHINING; DIGITAL LITHOGRAPHY; FOCUSING MECHANISMS; HAZARDOUS CHEMICALS; MASK-LESS LITHOGRAPHY; MATERIAL REMOVAL; MATERIAL REMOVAL RATE; WORK PIECE SURFACE;

BIOHAZARDS; ENERGY UTILIZATION; FABRICATION;

LITHOGRAPHY;

EID: 84885779870     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12206-013-0819-y     Document Type: Article

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