Characterization of piezoresistive microcantilever sensors with metal organic frameworks for the detection of volatile organic compounds

ECS Transactions

Volumn 50, Issue 12, 2013, Pages 469-476

  Ellern, I ^a   Venkatasubramanian, A ^a   Lee, J H ^b   Hesketh, P J ^a   Stavila, V ^c   Allendorf, M D ^c   Robinson, A L ^d  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b INTEL CORPORATION   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; CHEMICAL SENSORS; CHEMICAL STABILITY; COMPOSITE MICROMECHANICS; CRYSTALLINE MATERIALS; MEMS; ORGANOMETALLICS; VOLATILE ORGANIC COMPOUNDS;

CANTILEVER SENSORS; HIGH SURFACE AREA; METAL ORGANIC FRAMEWORK; METALORGANIC FRAMEWORKS (MOFS); PIEZORESISTIVE MICROCANTILEVER; SPECIFIC ADSORPTION; TIME CONSTANTS; VAPOR DETECTION;

CHEMICAL ANALYSIS;

EID: 84885760095     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05012.0469ecst     Document Type: Conference Paper

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