Rapid fabrication of self-ordered porous alumina with 10-/sub-10-nm-scale nanostructures by selenic acid anodizing

Scientific Reports

Volumn 3, Issue , 2013, Pages

  Nishinaga, Osamu ^a   Kikuchi, Tatsuya ^a   Natsui, Shungo ^a   Suzuki, Ryosuke O ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84885119463     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep02748     Document Type: Article

References (36)

1. Masuda, H. & Fukuda, K. Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268, 1466-1468 (1995).
2. Masuda, H. & Satoh, M. Fabrication of gold nanodot array using anodic porous alumina as an evaporation mask. Jpn. J. Appl. Phys. 35, L126-L129 (1996).
3. Yamaguchi, A. N. et al. Self-assembly of a silica-surfactant nanocomposite in a porous alumina membrane. Nature Materials 3, 337-341 (2004).
4. Lee, W., Ji, R., Gösele, U. & Nielsch, K. Fast fabrication of long-range ordered porous alumina membranes by hard anodization. Nature Materials 5, 741-747 (2006). (Pubitemid 44320327)
5. Jha, H., Kikuchi, T., Sakairi, M. & Takahashi, H. Synthesis of aluminum oxyhydroxide nanofibers from porous anodic alumina. Nanotechnology. 19, 395603 (6pp) (2008).
6. Yamauchi, Y., Nagaura, T. & Inoue, S. Oriented growth of small mesochannels utilizing a porous anodic alumina substrate: preparation of continuous film with standing mesochannels. Chem. Asian J. 4, 1059-1063 (2009).
7. Yamauchi, Y. et al. Generation of electron moiré fringes on designed nanoporous anodic alumina films and their replicated Ni cone arrays: exploration of domain sizes and nanopore arrangements. J. Phys. Chem. C 113, 9632-9637 (2009).
8. Yamauchi, Y., Nagaura, T., Ishikawa, A., Chikyow, T. & Inoue, S. Evolution of standing mesochannels on porous anodic alumina substrates with desighed conical holes. J. Am. Chem. Soc. 130, 10165-10170 (2008).
9. Zhao, X. et al. Nanocontainers made of various materials with tunable shape and size. Sci. Rep. 3, 2238 (2013).
10. Kikuchi, T., Wachi, Y., Sakairi, M. & Suzuki, R. O. Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution. Microelectron. Eng. 111, 14-20 (2013).
11. Lin, Q., Hua, B., Leung, S., Duan, X. & Fan, Z. Efficient light absorption with integrated nanopillar/nanowell arrays for three-dimensional thin-film photovoltaic applications. ACS Nano 3, 2725-2732 (2013).
12. Thompson, G. E., Furneaux, R. C., Wood, G. C., Richardson, J. A. & Gode, J. S. Nucleation and growth of porous anodic films on aluminium. Nature 272, 433-435 (1978).
13. Thompson, G. E. & Wood. Porous anodic film formation on aluminum. Nature 290, 230-232 (1981).
14. Furneaux, R. C., Rigby, W. C. & Davidson, A. P. The formation of controlledporosity membranes from anodically oxidized aluminum. Nature 337, 147-149 (1989).
15. Ono, S., Saito, M. & Asoh, H. Self-ordering of anodic porous alumina formed in organic acid electrolytes. Electrochim. Acta 51, 827-833 (2005). (Pubitemid 41554096)
16. Chu, S. Z. A. et al. Large-scale fabrication of ordered nanoporous alumina films with arbitrary pore intervals by critical-potential anodization. J. Electrochem. Soc. 153, B384-B391 (2006).
17. Kikuchi, T.,Wachi, Y., Takahashi, T., Sakairi, M. & Suzuki, R. O. Fabrication of a meniscus microlens array made of anodic alumina by laser irradiation and electrochemical techniques. Electrochim. Acta 94, 269-276 (2013).
18. Li, A. P., Müller, F., Birner, A., Nielsch, K. & Gösele, U. Polycrystalline nanopore arrays with hexagonal ordering on aluminum. J. Vac. Sci. Technol. A. 17, 1428-1431 (1999). (Pubitemid 129649432)
19. Lee, W., Nielsch, A. & Gösele, U. Self-ordering behavior of nanoporous anodic aluminum oxide (AAO) in malonic acid anodization. Nanotechnology. 18, 475713 (8 pp) (2007).
20. Fukushima, T., Fukuda, Y., Ito, G.& Sato, Y. Anodic oxidation and local corrosion of aluminum in mono-carboxylic acids. J. Surf. Fin. Soc. Jpn. 25, 319-326 (1970).
21. Fukushima, T., Fukuda, Y., Ito, G. & Okada, M. Anodic oxidation of aluminumin aqueous solution of dicarboxylic acids. J. Surf. Fin. Soc. Jpn. 25, 447-452 (1974).
22. Fukushima, T., Fukuda, Y., Ito, G. & Miyoshi, M. Anodic oxidation of aluminum at high current density in the aqueous solution of hydroxycarboxylic acids. J. Surf. Fin. Soc. Jpn. 25, 537-541 (1974).
23. Masuda, H., Hasegawa, F. & Ono, S. Self-ordering of cell arrangement of anodic porous alumina formed in sulfuric acid solution. J. Electrochem. Soc. 144, L127-L130 (1997). (Pubitemid 127591567)
24. Masuda, H., Yada, K. & Osaka, A. Self-ordering of cell configuration of anodic porous alumina with large-size pores in phosphoric acid solution. Jpn. J. Appl. Phys. 37, L1340-L1342 (1998). (Pubitemid 128565248)
25. Jessensky, O.,Müller, F. & Gösele, U. Self-organized formation of hexagonal pore arrays in anodic alumina. Appl. Phys. Lett. 72, 1173-1175 (1998).
26. Sulka, G. D. & Hnida, K. Distributed bragg reflector based on porous anodic alumina fabricated by pulse anodization. Nanotechnology 23, 075303 (8 pp) (2012).
27. Martin, J., Manzano, C. V., Caballero-Calero, O. & Martin-Gonzalez, M. Highaspect-ratio and highly ordered 15-nm porous alumina templates. ACS Appl. Mater. Inter. 5, 72-79 (2013).
28. Hoar, T. P. & Yahalom, J. The initiation of pores in anodic oxide films formed on aluminum in acid solutions. J. Electrochem. Soc. 110, 614-621 (1963).
29. Ono, S., Saito, M., Ishiguro, M. & Asoh, H. Controlling factor of self-ordering of anodic porous alumina. J. Electrochem. Soc. 151, B473-B478 (2004).
30. Houser, J. E. Hebert, K. R. The role of viscous flow of oxide in the growth of selfordered porous anodic alumina films. Nature Materials 8, 415-420 (2009).
31. Hebert, K. R.,Albu, S. P., Paramasivam, I.Schmuki, P. Morphological instability leading to formation of porous anodic oxide films. Nature Materials 11, 162-166 (2012).
32. Zhang, J., Kielbasa, J. K. & Carroll, D. L. Controllable fabrication of porous alumina templates for nanostructures synthesis. Mater. Chem. Phys. 122, 295-300 (2010).
33. Garcia-Vergara, S. J. P. et al.Mechanical instability and pore generation in anodic alumina. Proc. R. Soc. A 462, 2345-2358 (2006).
34. Nielsch, K., Choi, J., Schwirn, K., Wehrspohn, R. B. & Gösele, U. Self-ordering regimes of porous alumina: The 10% porosity rule. Nano Letters 2, 677-680 (2002).
35. Lee, W. U. et al. Structural engineering of nanoporous anodic aluminum oxide by pulse anodization of aluminum. Nature Nanotechnology 3, 234-239 (2008).
36. Masuda, H., Takenaka, K., Ishii, T. & Nishio, K. Long-range-ordered anodic porous alumina with less-than-30 nm hole intervals. Jpn. J. Appl. Phys. 45, L1165-L1167 (2006). (Pubitemid 47434523)