Photofabrication of periodic submicron structures using standing evanescent light for nano-stereolithography

Proceedings of the 20th Annual ASPE Meeting, ASPE 2005

Volumn , Issue , 2005, Pages

  Takahashi, Satoru ^a   Inazuki, Yuichi ^a   Kajihara, Yusuke ^a   Takamasu, Kiyoshi ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84884839491     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. T. Hayashi, et. al., Proc. Euspen '00, 98(2000).
3. S. Maruo, et al., Sensors and Actuators A, 100, 70 (2002).
4. S. Kawata, et al., Nature, 412, 697(2001).
5. Y. Kajihara, et al., Proc. ASPE'04, 149(2004).