A scalable six-axis electromagnetically-driven nanopositioner for nanomanufacturing

Proceedings of the 21st Annual ASPE Meeting, ASPE 2006

Volumn , Issue , 2006, Pages

  Golda, Dariusz ^a   Culpepper, Martin L ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CENTIMETER-SCALE; ELECTROMAGNETIC ACTUATORS; NANO-MANUFACTURING; NANO-POSITIONER; PLANAR DEVICES; PRECISE POSITIONING; RANGE-OF-MOTION; THIN FILM MATERIAL;

PRECISION ENGINEERING;

EID: 84884796842     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Lutwyche, M., et al., "Planar Micromagnetic X/Y/Z Scanner with Five Degrees of Freedom, " presented at Proceedings of the 194th Meeting of the Electrochemical Society, Boston, 1998.
2. Rothuizen, H., et al., "Compact Copper/Epoxy- Based Electromagnetic Scanner for Scanning Probe Applications, " presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Jan 20-24 2002, Las Vegas, NV, 2002.
3. Rothuizen, H., et al., "Fabrication of a Micromachined Magnetic X/Y/Z Scanner for Parallel Scanning Probe Applications, " Microelectronic Engineering, vol. 53, pp. 509- 512, 2000.
4. Pantazi, A., et al., "A Servomechanism for a Micro- Electromechanical-System-Based Scanning-Probe Data Storage Device, " Nanotechnology, vol. 15, pp. 612-621, 2004.
5. Malshe, A. P., et al., "Investigation of Nanoscale Electro Machining (Nano-Em) in Dielectric Oil, " presented at 55th CIRP General Assembly, Antalya, Turkey, 2005.
6. Culpepper, M. L. and Anderson, G., "Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism, " Precision Engineering, vol. 28, pp. 469-482, 2004.