SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 112, Issue , 2013, Pages 269-272

Development of MEMS integrated into TEM setup to monitor shear deformation, force and stress for nanotribology

(3) Sato, Takaaki a Jalabert, Laurent a Fujita, Hiroyuki a

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

Actual contact area; Friction; MEMS; TEM

Indexed keywords

ACTUAL CONTACTS; COLLECTIVE BEHAVIOR; FRICTIONAL COEFFICIENTS; MEMS INTEGRATED; NANOSCALE JUNCTIONS; NANOSCALE LEVELS; SLIDING SURFACE; STRENGTH INCREASE;

FRICTION; MEMS; NANOTECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

SHEAR DEFORMATION;

EID: 84884703688 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.03.156 Document Type: Article

Times cited : (10)

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