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Volumn 3, Issue 39, 2013, Pages 17968-17976
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Gas penetration through pneumatically driven PDMS micro valves
a
CSEM
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
COATINGS;
DESIGN;
DROPS;
FLUIDIC DEVICES;
FLUIDICS;
MICROCHANNELS;
PNEUMATICS;
SEALING (CLOSING);
ALIGNMENT ACCURACY;
FLEXIBLE MEMBRANES;
HYDRAULIC RESISTANCES;
LOW COST FABRICATION;
MICRO FLUIDIC SYSTEM;
MICROFLUIDIC CHANNEL;
PARYLENE COATINGS;
PNEUMATIC ACTUATION;
GAS PERMEABLE MEMBRANES;
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EID: 84884225593
PISSN: None
EISSN: 20462069
Source Type: Journal
DOI: 10.1039/c3ra42977f Document Type: Article |
Times cited : (15)
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References (20)
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