A novel sol-gel-based sensor for humidity detection

16th IMEKO TC4 Int. Symp.: Exploring New Frontiers of Instrum. and Methods for Electrical and Electronic Measurements; 13th TC21 Int. Workshop on ADC Modelling and Testing - Joint Session, Proc.

Volumn , Issue , 2008, Pages 584-589

  Betta, G ^a   Esposito, S ^a   Laracca, M ^a   Pansini, M ^a  

^a UNIVERSITY OF CASSINO AND SOUTHERN LAZIO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DOPED SILICAS; ENVIRONMENTAL POLLUTIONS; HUMIDITY DETECTION; INTEGRATED SENSORS; RESISTIVE HUMIDITY SENSOR; SENSING PRINCIPLE; SOL-GEL TECHNOLOGY;

HUMIDITY SENSORS; QUARTZ; SOL-GEL PROCESS;

SOL-GELS;

EID: 84883619167     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. C. Laville, J. Y. Deletage, and C. Pellet, "Humidity sensors for a pulmonary function diagnostic microsystem, " Sens. Actuators B, Chem., vol. 76, no. 1-3, pp. 304-309, 2001.
2. A. Tetelin, V. Pouget, J. Lachaud, C. Pellet, "Dynamic Behavior of a Chemical Sensor for Humidity Level Measurement in Human Breath, " IEEE Trans. Instrum. Meas., vol. 53, no. 4, pp. 1262-1267, Aug. 2004.
3. 4 ceramic humidity sensor using computer controlled humidity measurement set-up, " Sens. Actuators A, Phys., vol. 126, pp. 355-361, 2006.
4. A. Salehi, A. Nikfarjam, D. J. Kalantari, "Highly Sensitive Humidity Sensor Using Pd/Porous GaAs Schottky Contact, " IEEE Sensors Journal, vol. 6, no. 6, pp. 1415-1421, Dec. 2006.
5. Y. I. Wang, C. J. Simonson, R. W. Besant, W. Shang, "Transient Humidity Measurements: Part II-Determination of the Characteristics of an Interactive Device, " IEEE Trans. Instrum. Meas., vol. 56, no. 2, pp. 1080-1086, June 2007.
6. J. J. Steele, G. A. Fitzpatrick, M. J. Brett, "Capacitive Humidity Sensors With High Sensitivity and Subsecond Response Times, " IEEE Sensors Journal, vol. 7, no. 6, pp. 955-956, June 2007.
7. N. Carmona, E. Herrero, J. Llopis, M.A. Villegas, "Chemical sol-gel-based sensors for evaluation of environmental humidity, " Sens. Actuators B, Chem., vol. 126, pp. 455-460, 2007.
8. B. Okcan, T. Akin, "A Low-Power Robust Humidity Sensor in a Standard CMOS Process, " IEEE Trans. Electron Devices, vol. 54, no. 11, pp. 3071-3078, Nov. 2007.
9. X. F. Huang, D. R. Sheng, K. F. Cen, H. Zhou, "Low-cost relative humidity sensor based on thermoplastic polyimide-coated fiber Bragg grating, " Sens. Actuators B, Chem., vol. 127, pp. 518- 524, 2007.
10. 2 Nanoparticles, " IEEE Sensors Journal, vol. 8, no. 3, pp. 281-285, Mar. 2008.
11. A. K. Sen, J. Darabi, "Modeling and Optimization of a Microscale Capacitive Humidity Sensor for HVAC Applications, " IEEE Sensors Journal, vol. 8, no. 4, pp. 333-340, Apr. 2008.
12. N. Yamazoe and Y. Shimizu, "Humidity sensors: principles and applications, " Sensors and Actuators, vol. 10, pp. 379-398, 1986.
13. B.M. Kulwicki, "Humidity sensors", J. Am. Ceram. Soc., vol. 74, pp. 697-708, 1991.
14. E. Traversa, "Ceramic sensors for humidity detection: the state-of-art and future developments, " Sens. Actuators B, Chem., vol. 23, pp. 135-156, 1995.
15. J. Brinker and G.W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel processing, Academic Press, San Diego, 1990.