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Volumn , Issue , 2005, Pages 569-636

SiO 2 Films

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EID: 84882876007     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-081551499-2.50010-1     Document Type: Chapter
Times cited : (2)

References (122)
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    • (1985) Integrated Circuits , pp. 31
    • Irene, E.A.1
  • 5
    • 84942848112 scopus 로고    scopus 로고
    • III, E.D. Palik, Ed. Academic Press, Inc., Orlando Florida.
    • Handbook of Optical Properties of Solids Volumes I, II and III, E.D. Palik, Ed. Academic Press, Inc., Orlando Florida.
    • Handbook of Optical Properties of Solids , vol.1-2
  • 41
    • 0012552584 scopus 로고    scopus 로고
    • In Situ Real Time Characterization of Surfaces and Thin Film Growth via Ellipsometry
    • Chapter 3, John Wiley and Sons, Inc., New York, O. Auciello, A. Krauss (Eds.)
    • Irene E.A. In Situ Real Time Characterization of Surfaces and Thin Film Growth via Ellipsometry. In Situ Real Time Characterization of Thin Films 2001, Chapter 3, John Wiley and Sons, Inc., New York. O. Auciello, A. Krauss (Eds.).
    • (2001) In Situ Real Time Characterization of Thin Films
    • Irene, E.A.1
  • 42
    • 84882838731 scopus 로고    scopus 로고
    • In Situ Real-Time Characterization of Oxide Film Growth and Other Processes Via Spectroscopic Ellipsometry
    • Chapter for Volume 28 of the, accepted for
    • Irene E.A. In Situ Real-Time Characterization of Oxide Film Growth and Other Processes Via Spectroscopic Ellipsometry. Annual Review of Materials Science 2001, Chapter for Volume 28 of the, accepted for.
    • (2001) Annual Review of Materials Science
    • Irene, E.A.1
  • 83
    • 84882901554 scopus 로고
    • Springer-Verlog, F.R. Aussenberg, A. Leitner, M.E. Lippitech (Eds.)
    • Boyd Ian W. Surface Studies with Lasers 1983, 193. Springer-Verlog. F.R. Aussenberg, A. Leitner, M.E. Lippitech (Eds.).
    • (1983) Surface Studies with Lasers , pp. 193
    • Boyd, I.W.1
  • 108
    • 0003566406 scopus 로고
    • Plenum, New York, C.R. Helms, B.E. Deal (Eds.)
    • 2 Interface 1988, 505. Plenum, New York. C.R. Helms, B.E. Deal (Eds.).
    • (1988) 2 Interface , pp. 505
    • Maserjian, J.1
  • 112
    • 0003693693 scopus 로고    scopus 로고
    • The Electrochemical Soc. Inc., New Jersey, USA, H.Z. Massoud, C.R. Helms, E.H. Poindexter (Eds.)
    • 2 Interface III 1996, 81. The Electrochemical Soc. Inc., New Jersey, USA. H.Z. Massoud, C.R. Helms, E.H. Poindexter (Eds.).
    • (1996) 2 Interface III , pp. 81
    • Hebert, K.J.1    Labayen, T.2    Irene, E.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.