SCOPUS 정보 검색 플랫폼

Volumn 542, Issue , 2013, Pages 144-149

Influence of solvents on deposition mechanism of Al-doped ZnO films synthesized by cold wall aerosol-assisted chemical vapor deposition

(4) Qin, Xiu Juan a Zhao, Lin a Shao, Guang Jie a Wang, Na a

a YANSHAN UNIVERSITY (China)

Author keywords

Aerosol assisted chemical vapor deposition; Aluminum doped zinc oxide; Deposition; Solvents; Thin films

Indexed keywords

AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITIONS; AL-DOPED ZNO FILMS; ALUMINUM-DOPED ZINC OXIDE; DEPOSITION MECHANISM; DEPOSITION VELOCITIES; GLASS SUBSTRATES; ORIENTATION GROWTH; PRECURSOR SOLUTIONS;

AEROSOLS; ALUMINUM; ALUMINUM COATINGS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; METALLIC FILMS; ORGANIC SOLVENTS; SOLVENTS; SUBSTRATES; THIN FILMS; VAPORS; VISCOSITY;

DEPOSITION;

EID: 84881317227 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.07.002 Document Type: Article

Times cited : (26)

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