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Applied Physics Express

Volumn 6, Issue 5, 2013, Pages

Effective use of source gas for diamond growth with isotopic enrichment

(5) Teraji, Tokuyuki a Taniguchi, Takashi a Koizumi, Satoshi a Koide, Yasuo a Isoya, Junichi b

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

b UNIVERSITY OF TSUKUBA (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON CONSUMPTION; CARBON FEEDING; DIAMOND GROWTH; HIGH CARBONS; ISOTOPIC ENRICHMENT; MICROWAVE PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION; SOURCE GAS;

CHEMICAL VAPOR DEPOSITION; CONVERSION EFFICIENCY; DIAMOND FILMS; ISOTOPES; METHANE;

DIAMONDS;

EID: 84880903798 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.7567/APEX.6.055601 Document Type: Article

Times cited : (32)

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