CMOS-compatible and scalable deposition of nanocrystalline zinc ferrite thin film to improve inductance density of integrated RF inductor

IEEE Transactions on Magnetics

Volumn 49, Issue 7, 2013, Pages 4323-4326

  Sai, Ranajit ^a   Vinoy, K J ^a   Bhat, Navakanta ^a   Shivashankar, S A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

CMOS compatible; Deposition; Film; RF inductor; Zinc ferrite

Indexed keywords

CMOS COMPATIBLE; INDUCTANCE DENSITIES; INTEGRATED INDUCTORS; INTEGRATED RF INDUCTOR; RF INDUCTORS; SOLUTION COMPOSITION; SOLUTION-BASED DEPOSITION; ZINC FERRITE;

CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; FILMS; INDUCTANCE; MAGNETIC MATERIALS; THICK FILMS; THIN FILMS; ZINC COMPOUNDS;

DEPOSITION;

EID: 84880792619     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2013.2238514     Document Type: Article

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