Joint decision making for maintenance and production scheduling of production systems

International Journal of Advanced Manufacturing Technology

Volumn 66, Issue 5-8, 2013, Pages 1135-1146

  Lee, Seungchul ^a   Ni, Jun ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Condition based maintenance; Joint maintenance and product scheduling; Markov decision process; Semiconductor manufacturing

Indexed keywords

CONDITION BASED MAINTENANCE; JOINT DECISION MAKING; LONG-TERM DECISIONS; MARKOV DECISION PROCESSES; PRODUCT SCHEDULING; PRODUCTION SCHEDULING; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING PROCESS;

DECISION MAKING; INTEGER PROGRAMMING; MARKOV PROCESSES; PRODUCTION CONTROL; PRODUCTION ENGINEERING; QUALITY CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE;

MAINTENANCE;

EID: 84880571777     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-012-4395-6     Document Type: Article

References (30)

1. Sloan TW, Shanthikumar JG (2002) Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs. IIE Trans 34(2):191
2. Sloan TW, Shanthikumar JG (2000) Combined production and maintenance scheduling for a multiple-product, single-machine production system. Prod Oper Manag 9(4):379-399
3. Takahashi KM, Daugherty JE (1996) Current capabilities and limitations of in situ particle monitors in silicon processing equipment. J Vac Sci Technol A Vac Surf Films 14(6):2983-2993
4. Miyashita H, Kikuchi T, Kawasaki Y, Katakura Y, Ohsako N (1999) Particle measurements in vacuum tools by in situ particle monitor. J Vac Sci Technol A Vac Surf Films 17(3):1066-1070
5. Borden PG, Larson LA (1989) Benefits of real-time, in situ particle monitoring in production medium current implantation, semiconductor manufacturing. IEEE Transs on 2(4):141-145
6. Wang W, Christer AH (2000) Towards a general condition based maintenance model for a stochastic dynamic system. J Oper Res Soc 51(2):145-155
7. Djurdjanovic D, Liu Y (2006) Survey of predictive maintenance research and industry best practice. University of Michigan, Ann Arbor
8. Fernandez E, Fu M, and Marcus S (2002) Survey of current best practices in preventive maintenance scheduling in semiconductor manufacturing, SRC Deliverable Report Task ID p. 877-001
9. Yano CA, Lee HL (1995) Lot-sizing with random yields: a review. Oper Res 43(2):311
10. Ben-Daya M (1999) Integrated production maintenance and quality model for imperfect processes. IIE Trans 31(6):491-501
11. Ben-Daya M, Duffuaa SO (1995) Maintenance and quality: the missing link. J Qual Maint Eng 1(1):20-26
12. Rahim MA, Ben-Daya M (2001) Integrated models in production planning, inventory, quality, and maintenance. Kluwer Academic Publishers, New York
13. Kim C, Hong Y, Chang S (2001) Optimal production run length and inspection schedules in a deteriorating production process. IIE Trans 33(5):421-426
14. Lee HL, Rosenblatt MJ (1989) A production and maintenance planning model with restoration cost dependent on detection delay. IIE Trans 21(4):368-375
15. Makis V, Fung J (1998) An EMQ model with inspections and random machine failures. J Oper Res Soc 49(1):66-76
16. Freimer M, Thomas D, Tyworth J (2006) The value of setup cost reduction and process improvement for the economic production quantity model with defects. Eur J Oper Res 173(1):241-251
17. Sloan T (2008) Simultaneous determination of production and maintenance schedules using in-line equipment condition and yield information. Nav Res Logist 55(2):116-129
18. Zhou J (2007) Joint decision making on preventive maintenance and reconfiguration in complex manufacturing systems. Ph.D. thesis, University of Michigan, Ann Arbor
19. Monden Y (1983) Toyota Production system: practical approach to production management. Industrial Engineering and Management Press
20. Shingo S (1985) A revolution in manufacturing: the SMED system. Productivity Press, New York
21. Ross SM (1996) Stochastic processes, probability and statistics. Wiley, New York
22. Lee S, Li L, and Ni J (2010) Online degradation assessment and adaptive fault detection using modified hidden Markov model. Journal of Manufacturing Science and Engineering
23. Liu Y (2008) Predictive modeling for intelligent maintenance in complex semiconductor manufacturing processes. Ph.D. thesis, University of Michigan, Ann Arbor
24. Osogami T, Harchol-Balter M (2006) Closed form solutions for mapping general distributions to quasi-minimal PH distributions. Perform Eval 63(6):524-552
25. Ruiz-Castro JE, Fernandez-Villodre G, Perez-Ocon R (2009) A level-dependent general discrete system involving phase-type distributions. IIE Trans 41(1):45-56
26. Li L, Ni J (2009) Short-term decision support system for maintenance task prioritization. Int J Prod Econ 121(1):195-202
27. Bellman R (1957) A Markovian decision process. J Math Mech 6(5):679-684
28. Manne AS (1960) Linear programming and sequential decisions. Manag Sci 6(3):259-267
29. Yang Z, Chang Q, Djurdjanovic D, Ni J, Lee J (2007) Maintenance priority assignment utilizing on-line production information. J Manuf Sci Eng 129(2):435-446
30. Ambani S, Li L, Ni J (2009) Condition-based maintenance decision-making for multiple machine systems. J Manuf Sci Eng 131(3):031009:1-031009:9